1/12/2012	8:01:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/12/2012	8:01:57 AM	Recipe started at 8:01 AM
1/12/2012	8:01:57 AM	Helium valve closed
1/12/2012	8:01:57 AM	H2 valve closed
1/12/2012	8:01:57 AM	BCl3 valve closed
1/12/2012	8:01:57 AM	PH3 valve closed
1/12/2012	8:01:57 AM	SiCl4 pre valve closed
1/12/2012	8:01:58 AM	SiCl4 post valve closed
1/12/2012	8:01:58 AM	Main Vac valve closed
1/12/2012	8:01:58 AM	Bypass valve closed
1/12/2012	8:01:58 AM	Bubbler valve closed
1/12/2012	8:01:58 AM	Helium MFC set to  0.000000
1/12/2012	8:01:58 AM	H2 MFC set to  0.000000
1/12/2012	8:01:58 AM	BCl3 MFC set to  0.000000
1/12/2012	8:01:58 AM	PH3 MFC set to  0.000000
1/12/2012	8:01:58 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:01:58 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:01:58 AM	Tube furnace set to 0
1/12/2012	8:02:01 AM	H2 valve closed
1/12/2012	8:02:01 AM	BCl3 valve closed
1/12/2012	8:02:01 AM	PH3 valve closed
1/12/2012	8:02:01 AM	SiCl4 pre valve closed
1/12/2012	8:02:01 AM	SiCl4 post valve closed
1/12/2012	8:02:01 AM	Main Vac valve closed
1/12/2012	8:02:01 AM	Bypass valve closed
1/12/2012	8:02:01 AM	Bubbler valve closed
1/12/2012	8:02:01 AM	Helium valve opened
1/12/2012	8:02:01 AM	Helium MFC set to  500.000000
1/12/2012	8:02:01 AM	H2 MFC set to  0.000000
1/12/2012	8:02:01 AM	BCl3 MFC set to  0.000000
1/12/2012	8:02:01 AM	PH3 MFC set to  0.000000
1/12/2012	8:02:01 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:02:01 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:02:01 AM	Tube furnace set to 0
1/12/2012	8:03:06 AM	Helium valve closed
1/12/2012	8:03:06 AM	H2 valve closed
1/12/2012	8:03:06 AM	BCl3 valve closed
1/12/2012	8:03:06 AM	PH3 valve closed
1/12/2012	8:03:06 AM	SiCl4 pre valve closed
1/12/2012	8:03:06 AM	SiCl4 post valve closed
1/12/2012	8:03:06 AM	Main Vac valve closed
1/12/2012	8:03:06 AM	Bypass valve closed
1/12/2012	8:03:06 AM	Bubbler valve closed
1/12/2012	8:03:06 AM	Helium MFC set to  0.000000
1/12/2012	8:03:06 AM	H2 MFC set to  0.000000
1/12/2012	8:03:06 AM	BCl3 MFC set to  0.000000
1/12/2012	8:03:06 AM	PH3 MFC set to  0.000000
1/12/2012	8:03:06 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:03:06 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:03:06 AM	Tube furnace set to 0
1/12/2012	8:03:07 AM	Run finished at 8:03 AM
1/12/2012	8:03:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/12/2012	8:14:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2012	8:14:55 AM	Recipe started at 8:14 AM
1/12/2012	8:14:55 AM	Helium valve closed
1/12/2012	8:14:55 AM	H2 valve closed
1/12/2012	8:14:55 AM	BCl3 valve closed
1/12/2012	8:14:55 AM	PH3 valve closed
1/12/2012	8:14:55 AM	SiCl4 pre valve closed
1/12/2012	8:14:55 AM	SiCl4 post valve closed
1/12/2012	8:14:55 AM	Main Vac valve closed
1/12/2012	8:14:55 AM	Bubbler valve closed
1/12/2012	8:14:56 AM	Bypass valve opened
1/12/2012	8:14:56 AM	Helium MFC set to  0.000000
1/12/2012	8:14:56 AM	H2 MFC set to  0.000000
1/12/2012	8:14:56 AM	BCl3 MFC set to  0.000000
1/12/2012	8:14:56 AM	PH3 MFC set to  0.000000
1/12/2012	8:14:56 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:14:56 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:14:56 AM	Tube furnace set to 0
1/12/2012	8:15:57 AM	Helium valve closed
1/12/2012	8:15:57 AM	H2 valve closed
1/12/2012	8:15:57 AM	BCl3 valve closed
1/12/2012	8:15:57 AM	PH3 valve closed
1/12/2012	8:15:57 AM	SiCl4 pre valve closed
1/12/2012	8:15:57 AM	SiCl4 post valve closed
1/12/2012	8:15:57 AM	Main Vac valve closed
1/12/2012	8:15:57 AM	Bubbler valve closed
1/12/2012	8:15:57 AM	Bypass valve opened
1/12/2012	8:15:57 AM	Helium MFC set to  0.000000
1/12/2012	8:15:57 AM	H2 MFC set to  0.000000
1/12/2012	8:15:57 AM	BCl3 MFC set to  0.000000
1/12/2012	8:15:57 AM	PH3 MFC set to  0.000000
1/12/2012	8:15:57 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:15:57 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:15:57 AM	Tube furnace set to 0
1/12/2012	8:16:57 AM	Helium valve closed
1/12/2012	8:16:57 AM	H2 valve closed
1/12/2012	8:16:57 AM	BCl3 valve closed
1/12/2012	8:16:57 AM	PH3 valve closed
1/12/2012	8:16:57 AM	SiCl4 pre valve closed
1/12/2012	8:16:57 AM	SiCl4 post valve closed
1/12/2012	8:16:57 AM	Bypass valve closed
1/12/2012	8:16:57 AM	Bubbler valve closed
1/12/2012	8:16:57 AM	Main Vac valve opened
1/12/2012	8:16:57 AM	Helium MFC set to  0.000000
1/12/2012	8:16:57 AM	H2 MFC set to  0.000000
1/12/2012	8:16:57 AM	BCl3 MFC set to  0.000000
1/12/2012	8:16:57 AM	PH3 MFC set to  0.000000
1/12/2012	8:16:57 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:16:57 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:16:57 AM	Tube furnace set to 0
1/12/2012	8:16:58 AM	Run finished at 8:16 AM
1/12/2012	8:16:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2012	8:21:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/12/2012	8:21:31 AM	Recipe started at 8:21 AM
1/12/2012	8:21:31 AM	Helium valve closed
1/12/2012	8:21:31 AM	H2 valve closed
1/12/2012	8:21:31 AM	BCl3 valve closed
1/12/2012	8:21:31 AM	PH3 valve closed
1/12/2012	8:21:31 AM	SiCl4 pre valve closed
1/12/2012	8:21:31 AM	SiCl4 post valve closed
1/12/2012	8:21:31 AM	Main Vac valve closed
1/12/2012	8:21:31 AM	Bubbler valve closed
1/12/2012	8:21:31 AM	Bypass valve opened
1/12/2012	8:21:31 AM	Helium MFC set to  0.000000
1/12/2012	8:21:31 AM	H2 MFC set to  0.000000
1/12/2012	8:21:31 AM	BCl3 MFC set to  0.000000
1/12/2012	8:21:31 AM	PH3 MFC set to  0.000000
1/12/2012	8:21:31 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:21:31 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:21:32 AM	Tube furnace set to 0
1/12/2012	8:21:32 AM	Helium valve closed
1/12/2012	8:21:32 AM	H2 valve closed
1/12/2012	8:21:32 AM	BCl3 valve closed
1/12/2012	8:21:32 AM	PH3 valve closed
1/12/2012	8:21:32 AM	SiCl4 pre valve closed
1/12/2012	8:21:32 AM	SiCl4 post valve closed
1/12/2012	8:21:32 AM	Main Vac valve closed
1/12/2012	8:21:32 AM	Bubbler valve closed
1/12/2012	8:21:32 AM	Bypass valve opened
1/12/2012	8:21:32 AM	Helium MFC set to  0.000000
1/12/2012	8:21:32 AM	H2 MFC set to  0.000000
1/12/2012	8:21:32 AM	BCl3 MFC set to  0.000000
1/12/2012	8:21:32 AM	PH3 MFC set to  0.000000
1/12/2012	8:21:32 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:21:32 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:21:32 AM	Tube furnace set to 0
1/12/2012	8:22:02 AM	Helium valve closed
1/12/2012	8:22:02 AM	H2 valve closed
1/12/2012	8:22:02 AM	BCl3 valve closed
1/12/2012	8:22:02 AM	PH3 valve closed
1/12/2012	8:22:02 AM	SiCl4 pre valve closed
1/12/2012	8:22:02 AM	SiCl4 post valve closed
1/12/2012	8:22:02 AM	Bypass valve closed
1/12/2012	8:22:02 AM	Bubbler valve closed
1/12/2012	8:22:02 AM	Main Vac valve opened
1/12/2012	8:22:02 AM	Helium MFC set to  0.000000
1/12/2012	8:22:02 AM	H2 MFC set to  0.000000
1/12/2012	8:22:02 AM	BCl3 MFC set to  0.000000
1/12/2012	8:22:02 AM	PH3 MFC set to  0.000000
1/12/2012	8:22:02 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:22:02 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:22:02 AM	Tube furnace set to 0
1/12/2012	8:22:32 AM	H2 valve closed
1/12/2012	8:22:32 AM	BCl3 valve closed
1/12/2012	8:22:32 AM	PH3 valve closed
1/12/2012	8:22:32 AM	SiCl4 pre valve closed
1/12/2012	8:22:32 AM	SiCl4 post valve closed
1/12/2012	8:22:32 AM	Bypass valve closed
1/12/2012	8:22:32 AM	Bubbler valve closed
1/12/2012	8:22:32 AM	Helium valve opened
1/12/2012	8:22:32 AM	Main Vac valve opened
1/12/2012	8:22:32 AM	Helium MFC set to  20.000000
1/12/2012	8:22:32 AM	H2 MFC set to  0.000000
1/12/2012	8:22:32 AM	BCl3 MFC set to  0.000000
1/12/2012	8:22:32 AM	PH3 MFC set to  0.000000
1/12/2012	8:22:32 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:22:32 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:22:32 AM	Tube furnace set to 0
1/12/2012	8:23:02 AM	Helium valve closed
1/12/2012	8:23:02 AM	H2 valve closed
1/12/2012	8:23:02 AM	BCl3 valve closed
1/12/2012	8:23:02 AM	PH3 valve closed
1/12/2012	8:23:02 AM	SiCl4 pre valve closed
1/12/2012	8:23:02 AM	SiCl4 post valve closed
1/12/2012	8:23:02 AM	Bypass valve closed
1/12/2012	8:23:02 AM	Bubbler valve closed
1/12/2012	8:23:02 AM	Main Vac valve opened
1/12/2012	8:23:02 AM	Helium MFC set to  0.000000
1/12/2012	8:23:02 AM	H2 MFC set to  0.000000
1/12/2012	8:23:03 AM	BCl3 MFC set to  0.000000
1/12/2012	8:23:03 AM	PH3 MFC set to  0.000000
1/12/2012	8:23:03 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:23:03 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:23:03 AM	Tube furnace set to 0
1/12/2012	8:23:33 AM	H2 valve closed
1/12/2012	8:23:33 AM	BCl3 valve closed
1/12/2012	8:23:33 AM	PH3 valve closed
1/12/2012	8:23:33 AM	SiCl4 pre valve closed
1/12/2012	8:23:33 AM	SiCl4 post valve closed
1/12/2012	8:23:33 AM	Bypass valve closed
1/12/2012	8:23:33 AM	Bubbler valve closed
1/12/2012	8:23:33 AM	Helium valve opened
1/12/2012	8:23:33 AM	Main Vac valve opened
1/12/2012	8:23:33 AM	Helium MFC set to  20.000000
1/12/2012	8:23:33 AM	H2 MFC set to  0.000000
1/12/2012	8:23:33 AM	BCl3 MFC set to  0.000000
1/12/2012	8:23:33 AM	PH3 MFC set to  0.000000
1/12/2012	8:23:33 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:23:33 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:23:33 AM	Tube furnace set to 0
1/12/2012	8:24:03 AM	Helium valve closed
1/12/2012	8:24:03 AM	H2 valve closed
1/12/2012	8:24:03 AM	BCl3 valve closed
1/12/2012	8:24:03 AM	PH3 valve closed
1/12/2012	8:24:03 AM	SiCl4 pre valve closed
1/12/2012	8:24:03 AM	SiCl4 post valve closed
1/12/2012	8:24:03 AM	Bypass valve closed
1/12/2012	8:24:03 AM	Bubbler valve closed
1/12/2012	8:24:03 AM	Main Vac valve opened
1/12/2012	8:24:03 AM	Helium MFC set to  0.000000
1/12/2012	8:24:03 AM	H2 MFC set to  0.000000
1/12/2012	8:24:03 AM	BCl3 MFC set to  0.000000
1/12/2012	8:24:03 AM	PH3 MFC set to  0.000000
1/12/2012	8:24:03 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:24:03 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:24:03 AM	Tube furnace set to 0
1/12/2012	8:24:33 AM	H2 valve closed
1/12/2012	8:24:33 AM	BCl3 valve closed
1/12/2012	8:24:33 AM	PH3 valve closed
1/12/2012	8:24:33 AM	SiCl4 pre valve closed
1/12/2012	8:24:33 AM	SiCl4 post valve closed
1/12/2012	8:24:33 AM	Bypass valve closed
1/12/2012	8:24:33 AM	Bubbler valve closed
1/12/2012	8:24:33 AM	Helium valve opened
1/12/2012	8:24:33 AM	Main Vac valve opened
1/12/2012	8:24:33 AM	Helium MFC set to  20.000000
1/12/2012	8:24:33 AM	H2 MFC set to  0.000000
1/12/2012	8:24:33 AM	BCl3 MFC set to  0.000000
1/12/2012	8:24:33 AM	PH3 MFC set to  0.000000
1/12/2012	8:24:33 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:24:33 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:24:33 AM	Tube furnace set to 0
1/12/2012	8:25:03 AM	Helium valve closed
1/12/2012	8:25:03 AM	H2 valve closed
1/12/2012	8:25:03 AM	BCl3 valve closed
1/12/2012	8:25:03 AM	PH3 valve closed
1/12/2012	8:25:03 AM	SiCl4 pre valve closed
1/12/2012	8:25:03 AM	SiCl4 post valve closed
1/12/2012	8:25:03 AM	Bypass valve closed
1/12/2012	8:25:03 AM	Bubbler valve closed
1/12/2012	8:25:03 AM	Main Vac valve opened
1/12/2012	8:25:03 AM	Helium MFC set to  0.000000
1/12/2012	8:25:03 AM	H2 MFC set to  0.000000
1/12/2012	8:25:03 AM	BCl3 MFC set to  0.000000
1/12/2012	8:25:03 AM	PH3 MFC set to  0.000000
1/12/2012	8:25:03 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:25:03 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:25:03 AM	Tube furnace set to 0
1/12/2012	8:25:33 AM	H2 valve closed
1/12/2012	8:25:33 AM	BCl3 valve closed
1/12/2012	8:25:33 AM	PH3 valve closed
1/12/2012	8:25:34 AM	SiCl4 pre valve closed
1/12/2012	8:25:34 AM	SiCl4 post valve closed
1/12/2012	8:25:34 AM	Bypass valve closed
1/12/2012	8:25:34 AM	Bubbler valve closed
1/12/2012	8:25:34 AM	Helium valve opened
1/12/2012	8:25:34 AM	Main Vac valve opened
1/12/2012	8:25:34 AM	Helium MFC set to  20.000000
1/12/2012	8:25:34 AM	H2 MFC set to  0.000000
1/12/2012	8:25:34 AM	BCl3 MFC set to  0.000000
1/12/2012	8:25:34 AM	PH3 MFC set to  0.000000
1/12/2012	8:25:34 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:25:34 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:25:34 AM	Tube furnace set to 0
1/12/2012	8:26:04 AM	Helium valve closed
1/12/2012	8:26:04 AM	H2 valve closed
1/12/2012	8:26:04 AM	BCl3 valve closed
1/12/2012	8:26:04 AM	PH3 valve closed
1/12/2012	8:26:04 AM	SiCl4 pre valve closed
1/12/2012	8:26:04 AM	SiCl4 post valve closed
1/12/2012	8:26:04 AM	Bypass valve closed
1/12/2012	8:26:04 AM	Bubbler valve closed
1/12/2012	8:26:04 AM	Main Vac valve opened
1/12/2012	8:26:04 AM	Helium MFC set to  0.000000
1/12/2012	8:26:04 AM	H2 MFC set to  0.000000
1/12/2012	8:26:04 AM	BCl3 MFC set to  0.000000
1/12/2012	8:26:04 AM	PH3 MFC set to  0.000000
1/12/2012	8:26:04 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:26:04 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:26:04 AM	Tube furnace set to 0
1/12/2012	8:26:34 AM	H2 valve closed
1/12/2012	8:26:34 AM	BCl3 valve closed
1/12/2012	8:26:34 AM	PH3 valve closed
1/12/2012	8:26:34 AM	SiCl4 pre valve closed
1/12/2012	8:26:34 AM	SiCl4 post valve closed
1/12/2012	8:26:34 AM	Bypass valve closed
1/12/2012	8:26:34 AM	Bubbler valve closed
1/12/2012	8:26:34 AM	Helium valve opened
1/12/2012	8:26:34 AM	Main Vac valve opened
1/12/2012	8:26:34 AM	Helium MFC set to  20.000000
1/12/2012	8:26:34 AM	H2 MFC set to  0.000000
1/12/2012	8:26:34 AM	BCl3 MFC set to  0.000000
1/12/2012	8:26:34 AM	PH3 MFC set to  0.000000
1/12/2012	8:26:34 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:26:34 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:26:34 AM	Tube furnace set to 0
1/12/2012	8:27:04 AM	Helium valve closed
1/12/2012	8:27:04 AM	H2 valve closed
1/12/2012	8:27:04 AM	BCl3 valve closed
1/12/2012	8:27:04 AM	PH3 valve closed
1/12/2012	8:27:04 AM	SiCl4 pre valve closed
1/12/2012	8:27:04 AM	SiCl4 post valve closed
1/12/2012	8:27:04 AM	Bypass valve closed
1/12/2012	8:27:04 AM	Bubbler valve closed
1/12/2012	8:27:04 AM	Main Vac valve opened
1/12/2012	8:27:04 AM	Helium MFC set to  0.000000
1/12/2012	8:27:04 AM	H2 MFC set to  0.000000
1/12/2012	8:27:04 AM	BCl3 MFC set to  0.000000
1/12/2012	8:27:04 AM	PH3 MFC set to  0.000000
1/12/2012	8:27:04 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:27:04 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:27:04 AM	Tube furnace set to 0
1/12/2012	8:27:34 AM	H2 valve closed
1/12/2012	8:27:34 AM	BCl3 valve closed
1/12/2012	8:27:34 AM	PH3 valve closed
1/12/2012	8:27:34 AM	SiCl4 pre valve closed
1/12/2012	8:27:34 AM	SiCl4 post valve closed
1/12/2012	8:27:34 AM	Bypass valve closed
1/12/2012	8:27:34 AM	Bubbler valve closed
1/12/2012	8:27:34 AM	Helium valve opened
1/12/2012	8:27:34 AM	Main Vac valve opened
1/12/2012	8:27:34 AM	Helium MFC set to  20.000000
1/12/2012	8:27:34 AM	H2 MFC set to  0.000000
1/12/2012	8:27:34 AM	BCl3 MFC set to  0.000000
1/12/2012	8:27:34 AM	PH3 MFC set to  0.000000
1/12/2012	8:27:34 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:27:34 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:27:34 AM	Tube furnace set to 0
1/12/2012	8:28:05 AM	Helium valve closed
1/12/2012	8:28:05 AM	H2 valve closed
1/12/2012	8:28:05 AM	BCl3 valve closed
1/12/2012	8:28:05 AM	PH3 valve closed
1/12/2012	8:28:05 AM	SiCl4 pre valve closed
1/12/2012	8:28:05 AM	SiCl4 post valve closed
1/12/2012	8:28:05 AM	Bypass valve closed
1/12/2012	8:28:05 AM	Bubbler valve closed
1/12/2012	8:28:05 AM	Main Vac valve opened
1/12/2012	8:28:05 AM	Helium MFC set to  0.000000
1/12/2012	8:28:05 AM	H2 MFC set to  0.000000
1/12/2012	8:28:05 AM	BCl3 MFC set to  0.000000
1/12/2012	8:28:05 AM	PH3 MFC set to  0.000000
1/12/2012	8:28:05 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:28:05 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:28:05 AM	Tube furnace set to 0
1/12/2012	8:28:35 AM	H2 valve closed
1/12/2012	8:28:35 AM	BCl3 valve closed
1/12/2012	8:28:35 AM	PH3 valve closed
1/12/2012	8:28:35 AM	SiCl4 pre valve closed
1/12/2012	8:28:35 AM	SiCl4 post valve closed
1/12/2012	8:28:35 AM	Bypass valve closed
1/12/2012	8:28:35 AM	Bubbler valve closed
1/12/2012	8:28:35 AM	Helium valve opened
1/12/2012	8:28:35 AM	Main Vac valve opened
1/12/2012	8:28:35 AM	Helium MFC set to  20.000000
1/12/2012	8:28:35 AM	H2 MFC set to  0.000000
1/12/2012	8:28:35 AM	BCl3 MFC set to  0.000000
1/12/2012	8:28:35 AM	PH3 MFC set to  0.000000
1/12/2012	8:28:35 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:28:35 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:28:35 AM	Tube furnace set to 0
1/12/2012	8:29:05 AM	Helium valve closed
1/12/2012	8:29:05 AM	H2 valve closed
1/12/2012	8:29:05 AM	BCl3 valve closed
1/12/2012	8:29:05 AM	PH3 valve closed
1/12/2012	8:29:05 AM	SiCl4 pre valve closed
1/12/2012	8:29:05 AM	SiCl4 post valve closed
1/12/2012	8:29:05 AM	Bypass valve closed
1/12/2012	8:29:05 AM	Bubbler valve closed
1/12/2012	8:29:05 AM	Main Vac valve opened
1/12/2012	8:29:05 AM	Helium MFC set to  0.000000
1/12/2012	8:29:05 AM	H2 MFC set to  0.000000
1/12/2012	8:29:05 AM	BCl3 MFC set to  0.000000
1/12/2012	8:29:05 AM	PH3 MFC set to  0.000000
1/12/2012	8:29:05 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:29:05 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:29:05 AM	Tube furnace set to 0
1/12/2012	8:29:35 AM	H2 valve closed
1/12/2012	8:29:35 AM	BCl3 valve closed
1/12/2012	8:29:35 AM	PH3 valve closed
1/12/2012	8:29:35 AM	SiCl4 pre valve closed
1/12/2012	8:29:35 AM	SiCl4 post valve closed
1/12/2012	8:29:35 AM	Bypass valve closed
1/12/2012	8:29:35 AM	Bubbler valve closed
1/12/2012	8:29:35 AM	Helium valve opened
1/12/2012	8:29:35 AM	Main Vac valve opened
1/12/2012	8:29:35 AM	Helium MFC set to  20.000000
1/12/2012	8:29:35 AM	H2 MFC set to  0.000000
1/12/2012	8:29:35 AM	BCl3 MFC set to  0.000000
1/12/2012	8:29:35 AM	PH3 MFC set to  0.000000
1/12/2012	8:29:35 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:29:35 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:29:35 AM	Tube furnace set to 0
1/12/2012	8:30:05 AM	Helium valve closed
1/12/2012	8:30:05 AM	H2 valve closed
1/12/2012	8:30:05 AM	BCl3 valve closed
1/12/2012	8:30:05 AM	PH3 valve closed
1/12/2012	8:30:05 AM	SiCl4 pre valve closed
1/12/2012	8:30:05 AM	SiCl4 post valve closed
1/12/2012	8:30:05 AM	Bypass valve closed
1/12/2012	8:30:05 AM	Bubbler valve closed
1/12/2012	8:30:05 AM	Main Vac valve opened
1/12/2012	8:30:05 AM	Helium MFC set to  0.000000
1/12/2012	8:30:05 AM	H2 MFC set to  0.000000
1/12/2012	8:30:05 AM	BCl3 MFC set to  0.000000
1/12/2012	8:30:05 AM	PH3 MFC set to  0.000000
1/12/2012	8:30:05 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:30:05 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:30:06 AM	Tube furnace set to 0
1/12/2012	8:30:36 AM	H2 valve closed
1/12/2012	8:30:36 AM	BCl3 valve closed
1/12/2012	8:30:36 AM	PH3 valve closed
1/12/2012	8:30:36 AM	SiCl4 pre valve closed
1/12/2012	8:30:36 AM	SiCl4 post valve closed
1/12/2012	8:30:36 AM	Bypass valve closed
1/12/2012	8:30:36 AM	Bubbler valve closed
1/12/2012	8:30:36 AM	Helium valve opened
1/12/2012	8:30:36 AM	Main Vac valve opened
1/12/2012	8:30:36 AM	Helium MFC set to  20.000000
1/12/2012	8:30:36 AM	H2 MFC set to  0.000000
1/12/2012	8:30:36 AM	BCl3 MFC set to  0.000000
1/12/2012	8:30:36 AM	PH3 MFC set to  0.000000
1/12/2012	8:30:36 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:30:36 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:30:36 AM	Tube furnace set to 0
1/12/2012	8:31:06 AM	Helium valve closed
1/12/2012	8:31:06 AM	H2 valve closed
1/12/2012	8:31:06 AM	BCl3 valve closed
1/12/2012	8:31:06 AM	PH3 valve closed
1/12/2012	8:31:06 AM	SiCl4 pre valve closed
1/12/2012	8:31:06 AM	SiCl4 post valve closed
1/12/2012	8:31:06 AM	Bypass valve closed
1/12/2012	8:31:06 AM	Bubbler valve closed
1/12/2012	8:31:06 AM	Main Vac valve opened
1/12/2012	8:31:06 AM	Helium MFC set to  0.000000
1/12/2012	8:31:06 AM	H2 MFC set to  0.000000
1/12/2012	8:31:06 AM	BCl3 MFC set to  0.000000
1/12/2012	8:31:06 AM	PH3 MFC set to  0.000000
1/12/2012	8:31:06 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:31:06 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:31:06 AM	Tube furnace set to 0
1/12/2012	8:31:36 AM	H2 valve closed
1/12/2012	8:31:36 AM	BCl3 valve closed
1/12/2012	8:31:36 AM	PH3 valve closed
1/12/2012	8:31:36 AM	SiCl4 pre valve closed
1/12/2012	8:31:36 AM	SiCl4 post valve closed
1/12/2012	8:31:36 AM	Bypass valve closed
1/12/2012	8:31:36 AM	Bubbler valve closed
1/12/2012	8:31:36 AM	Helium valve opened
1/12/2012	8:31:36 AM	Main Vac valve opened
1/12/2012	8:31:36 AM	Helium MFC set to  20.000000
1/12/2012	8:31:36 AM	H2 MFC set to  0.000000
1/12/2012	8:31:36 AM	BCl3 MFC set to  0.000000
1/12/2012	8:31:36 AM	PH3 MFC set to  0.000000
1/12/2012	8:31:36 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:31:36 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:31:36 AM	Tube furnace set to 0
1/12/2012	8:32:06 AM	Helium valve closed
1/12/2012	8:32:06 AM	H2 valve closed
1/12/2012	8:32:06 AM	BCl3 valve closed
1/12/2012	8:32:06 AM	PH3 valve closed
1/12/2012	8:32:06 AM	SiCl4 pre valve closed
1/12/2012	8:32:06 AM	SiCl4 post valve closed
1/12/2012	8:32:06 AM	Bypass valve closed
1/12/2012	8:32:06 AM	Bubbler valve closed
1/12/2012	8:32:06 AM	Main Vac valve opened
1/12/2012	8:32:06 AM	Helium MFC set to  0.000000
1/12/2012	8:32:06 AM	H2 MFC set to  0.000000
1/12/2012	8:32:06 AM	BCl3 MFC set to  0.000000
1/12/2012	8:32:06 AM	PH3 MFC set to  0.000000
1/12/2012	8:32:06 AM	SiCl4 MFC set to  0.000000
1/12/2012	8:32:06 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	8:32:06 AM	Tube furnace set to 0
1/12/2012	8:32:07 AM	Run finished at 8:32 AM
1/12/2012	8:32:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/12/2012	9:10:08 AM	Main Vac valve closed
1/12/2012	9:10:40 AM	Main Vac valve opened
1/12/2012	9:12:03 AM	Recipe started at 9:12 AM
1/12/2012	9:12:03 AM	Helium valve closed
1/12/2012	9:12:03 AM	H2 valve closed
1/12/2012	9:12:03 AM	BCl3 valve closed
1/12/2012	9:12:03 AM	PH3 valve closed
1/12/2012	9:12:03 AM	SiCl4 pre valve closed
1/12/2012	9:12:03 AM	SiCl4 post valve closed
1/12/2012	9:12:03 AM	Main Vac valve closed
1/12/2012	9:12:03 AM	Bypass valve closed
1/12/2012	9:12:03 AM	Bubbler valve closed
1/12/2012	9:12:03 AM	Helium MFC set to  0.000000
1/12/2012	9:12:03 AM	H2 MFC set to  0.000000
1/12/2012	9:12:03 AM	BCl3 MFC set to  0.000000
1/12/2012	9:12:03 AM	PH3 MFC set to  0.000000
1/12/2012	9:12:03 AM	SiCl4 MFC set to  0.000000
1/12/2012	9:12:03 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	9:12:04 AM	Tube furnace set to 0
1/12/2012	9:12:07 AM	Helium valve closed
1/12/2012	9:12:07 AM	BCl3 valve closed
1/12/2012	9:12:07 AM	PH3 valve closed
1/12/2012	9:12:07 AM	SiCl4 pre valve closed
1/12/2012	9:12:07 AM	SiCl4 post valve closed
1/12/2012	9:12:07 AM	Main Vac valve closed
1/12/2012	9:12:07 AM	Bypass valve closed
1/12/2012	9:12:07 AM	Bubbler valve closed
1/12/2012	9:12:07 AM	H2 valve opened
1/12/2012	9:12:07 AM	Helium MFC set to  0.000000
1/12/2012	9:12:07 AM	H2 MFC set to  500.000000
1/12/2012	9:12:07 AM	BCl3 MFC set to  0.000000
1/12/2012	9:12:07 AM	PH3 MFC set to  0.000000
1/12/2012	9:12:07 AM	SiCl4 MFC set to  0.000000
1/12/2012	9:12:07 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	9:12:07 AM	Tube furnace set to 0
1/12/2012	9:13:16 AM	Helium valve closed
1/12/2012	9:13:16 AM	BCl3 valve closed
1/12/2012	9:13:16 AM	PH3 valve closed
1/12/2012	9:13:16 AM	SiCl4 pre valve closed
1/12/2012	9:13:16 AM	SiCl4 post valve closed
1/12/2012	9:13:16 AM	Main Vac valve closed
1/12/2012	9:13:16 AM	Bypass valve closed
1/12/2012	9:13:16 AM	H2 valve opened
1/12/2012	9:13:16 AM	Bubbler valve opened
1/12/2012	9:13:16 AM	Helium MFC set to  0.000000
1/12/2012	9:13:16 AM	H2 MFC set to  500.000000
1/12/2012	9:13:16 AM	BCl3 MFC set to  0.000000
1/12/2012	9:13:16 AM	PH3 MFC set to  0.000000
1/12/2012	9:13:16 AM	SiCl4 MFC set to  0.000000
1/12/2012	9:13:16 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	9:13:16 AM	Tube furnace set to 0
1/12/2012	9:13:17 AM	Helium valve closed
1/12/2012	9:13:17 AM	BCl3 valve closed
1/12/2012	9:13:17 AM	PH3 valve closed
1/12/2012	9:13:17 AM	SiCl4 pre valve closed
1/12/2012	9:13:17 AM	SiCl4 post valve closed
1/12/2012	9:13:17 AM	Main Vac valve closed
1/12/2012	9:13:17 AM	Bypass valve closed
1/12/2012	9:13:17 AM	H2 valve opened
1/12/2012	9:13:17 AM	Bubbler valve opened
1/12/2012	9:13:17 AM	Helium MFC set to  0.000000
1/12/2012	9:13:17 AM	H2 MFC set to  500.000000
1/12/2012	9:13:17 AM	BCl3 MFC set to  0.000000
1/12/2012	9:13:17 AM	PH3 MFC set to  0.000000
1/12/2012	9:13:17 AM	SiCl4 MFC set to  0.000000
1/12/2012	9:13:17 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	9:13:17 AM	Tube furnace set to 1000
1/12/2012	9:35:17 AM	Helium valve closed
1/12/2012	9:35:17 AM	PH3 valve closed
1/12/2012	9:35:17 AM	Main Vac valve closed
1/12/2012	9:35:17 AM	Bypass valve closed
1/12/2012	9:35:17 AM	H2 valve opened
1/12/2012	9:35:17 AM	BCl3 valve opened
1/12/2012	9:35:17 AM	SiCl4 pre valve opened
1/12/2012	9:35:17 AM	SiCl4 post valve opened
1/12/2012	9:35:17 AM	Bubbler valve opened
1/12/2012	9:35:17 AM	Helium MFC set to  0.000000
1/12/2012	9:35:17 AM	H2 MFC set to  500.000000
1/12/2012	9:35:17 AM	BCl3 MFC set to  1.000000
1/12/2012	9:35:17 AM	PH3 MFC set to  0.000000
1/12/2012	9:35:17 AM	SiCl4 MFC set to  25.000000
1/12/2012	9:35:17 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	9:35:17 AM	Tube furnace set to 1000
1/12/2012	10:05:17 AM	Helium valve closed
1/12/2012	10:05:17 AM	BCl3 valve closed
1/12/2012	10:05:17 AM	PH3 valve closed
1/12/2012	10:05:17 AM	SiCl4 pre valve closed
1/12/2012	10:05:17 AM	SiCl4 post valve closed
1/12/2012	10:05:17 AM	Main Vac valve closed
1/12/2012	10:05:17 AM	Bypass valve closed
1/12/2012	10:05:17 AM	H2 valve opened
1/12/2012	10:05:17 AM	Bubbler valve opened
1/12/2012	10:05:17 AM	Helium MFC set to  0.000000
1/12/2012	10:05:17 AM	H2 MFC set to  500.000000
1/12/2012	10:05:17 AM	BCl3 MFC set to  0.000000
1/12/2012	10:05:17 AM	PH3 MFC set to  0.000000
1/12/2012	10:05:17 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:05:17 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:05:18 AM	Tube furnace set to 750
1/12/2012	10:10:18 AM	H2 valve closed
1/12/2012	10:10:18 AM	BCl3 valve closed
1/12/2012	10:10:18 AM	PH3 valve closed
1/12/2012	10:10:18 AM	SiCl4 pre valve closed
1/12/2012	10:10:18 AM	SiCl4 post valve closed
1/12/2012	10:10:18 AM	Main Vac valve closed
1/12/2012	10:10:18 AM	Bypass valve closed
1/12/2012	10:10:18 AM	Helium valve opened
1/12/2012	10:10:18 AM	Bubbler valve opened
1/12/2012	10:10:18 AM	Helium MFC set to  500.000000
1/12/2012	10:10:18 AM	H2 MFC set to  0.000000
1/12/2012	10:10:18 AM	BCl3 MFC set to  0.000000
1/12/2012	10:10:18 AM	PH3 MFC set to  0.000000
1/12/2012	10:10:18 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:10:18 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:10:18 AM	Tube furnace set to 0
1/12/2012	10:30:18 AM	Helium valve closed
1/12/2012	10:30:18 AM	H2 valve closed
1/12/2012	10:30:18 AM	BCl3 valve closed
1/12/2012	10:30:18 AM	PH3 valve closed
1/12/2012	10:30:18 AM	SiCl4 pre valve closed
1/12/2012	10:30:18 AM	SiCl4 post valve closed
1/12/2012	10:30:18 AM	Main Vac valve closed
1/12/2012	10:30:18 AM	Bypass valve closed
1/12/2012	10:30:18 AM	Bubbler valve closed
1/12/2012	10:30:18 AM	Helium MFC set to  0.000000
1/12/2012	10:30:18 AM	H2 MFC set to  0.000000
1/12/2012	10:30:18 AM	BCl3 MFC set to  0.000000
1/12/2012	10:30:18 AM	PH3 MFC set to  0.000000
1/12/2012	10:30:18 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:30:18 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:30:18 AM	Tube furnace set to 0
1/12/2012	10:30:19 AM	Run finished at 10:30 AM
1/12/2012	10:35:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2012	10:35:04 AM	Recipe started at 10:35 AM
1/12/2012	10:35:04 AM	Helium valve closed
1/12/2012	10:35:04 AM	H2 valve closed
1/12/2012	10:35:04 AM	BCl3 valve closed
1/12/2012	10:35:04 AM	PH3 valve closed
1/12/2012	10:35:04 AM	SiCl4 pre valve closed
1/12/2012	10:35:04 AM	SiCl4 post valve closed
1/12/2012	10:35:04 AM	Main Vac valve closed
1/12/2012	10:35:04 AM	Bubbler valve closed
1/12/2012	10:35:04 AM	Bypass valve opened
1/12/2012	10:35:04 AM	Helium MFC set to  0.000000
1/12/2012	10:35:04 AM	H2 MFC set to  0.000000
1/12/2012	10:35:04 AM	BCl3 MFC set to  0.000000
1/12/2012	10:35:04 AM	PH3 MFC set to  0.000000
1/12/2012	10:35:04 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:35:04 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:35:04 AM	Tube furnace set to 0
1/12/2012	10:36:01 AM	Helium valve closed
1/12/2012	10:36:01 AM	H2 valve closed
1/12/2012	10:36:01 AM	BCl3 valve closed
1/12/2012	10:36:01 AM	PH3 valve closed
1/12/2012	10:36:01 AM	SiCl4 pre valve closed
1/12/2012	10:36:01 AM	SiCl4 post valve closed
1/12/2012	10:36:01 AM	Main Vac valve closed
1/12/2012	10:36:01 AM	Bubbler valve closed
1/12/2012	10:36:01 AM	Bypass valve opened
1/12/2012	10:36:01 AM	Helium MFC set to  0.000000
1/12/2012	10:36:01 AM	H2 MFC set to  0.000000
1/12/2012	10:36:01 AM	BCl3 MFC set to  0.000000
1/12/2012	10:36:01 AM	PH3 MFC set to  0.000000
1/12/2012	10:36:01 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:36:01 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:36:01 AM	Tube furnace set to 0
1/12/2012	10:37:01 AM	Helium valve closed
1/12/2012	10:37:01 AM	H2 valve closed
1/12/2012	10:37:01 AM	BCl3 valve closed
1/12/2012	10:37:01 AM	PH3 valve closed
1/12/2012	10:37:01 AM	SiCl4 pre valve closed
1/12/2012	10:37:01 AM	SiCl4 post valve closed
1/12/2012	10:37:01 AM	Bypass valve closed
1/12/2012	10:37:01 AM	Bubbler valve closed
1/12/2012	10:37:01 AM	Main Vac valve opened
1/12/2012	10:37:01 AM	Helium MFC set to  0.000000
1/12/2012	10:37:01 AM	H2 MFC set to  0.000000
1/12/2012	10:37:01 AM	BCl3 MFC set to  0.000000
1/12/2012	10:37:01 AM	PH3 MFC set to  0.000000
1/12/2012	10:37:01 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:37:01 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:37:01 AM	Tube furnace set to 0
1/12/2012	10:37:02 AM	Run finished at 10:37 AM
1/12/2012	10:37:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2012	10:37:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/12/2012	10:37:55 AM	Recipe started at 10:37 AM
1/12/2012	10:37:55 AM	Helium valve closed
1/12/2012	10:37:55 AM	H2 valve closed
1/12/2012	10:37:55 AM	BCl3 valve closed
1/12/2012	10:37:55 AM	PH3 valve closed
1/12/2012	10:37:55 AM	SiCl4 pre valve closed
1/12/2012	10:37:55 AM	SiCl4 post valve closed
1/12/2012	10:37:55 AM	Main Vac valve closed
1/12/2012	10:37:55 AM	Bubbler valve closed
1/12/2012	10:37:55 AM	Bypass valve opened
1/12/2012	10:37:55 AM	Helium MFC set to  0.000000
1/12/2012	10:37:55 AM	H2 MFC set to  0.000000
1/12/2012	10:37:55 AM	BCl3 MFC set to  0.000000
1/12/2012	10:37:55 AM	PH3 MFC set to  0.000000
1/12/2012	10:37:55 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:37:55 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:37:56 AM	Tube furnace set to 0
1/12/2012	10:37:56 AM	Helium valve closed
1/12/2012	10:37:56 AM	H2 valve closed
1/12/2012	10:37:56 AM	BCl3 valve closed
1/12/2012	10:37:56 AM	PH3 valve closed
1/12/2012	10:37:56 AM	SiCl4 pre valve closed
1/12/2012	10:37:56 AM	SiCl4 post valve closed
1/12/2012	10:37:56 AM	Main Vac valve closed
1/12/2012	10:37:56 AM	Bubbler valve closed
1/12/2012	10:37:56 AM	Bypass valve opened
1/12/2012	10:37:56 AM	Helium MFC set to  0.000000
1/12/2012	10:37:56 AM	H2 MFC set to  0.000000
1/12/2012	10:37:56 AM	BCl3 MFC set to  0.000000
1/12/2012	10:37:56 AM	PH3 MFC set to  0.000000
1/12/2012	10:37:56 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:37:56 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:37:56 AM	Tube furnace set to 0
1/12/2012	10:38:26 AM	Helium valve closed
1/12/2012	10:38:26 AM	H2 valve closed
1/12/2012	10:38:26 AM	BCl3 valve closed
1/12/2012	10:38:26 AM	PH3 valve closed
1/12/2012	10:38:26 AM	SiCl4 pre valve closed
1/12/2012	10:38:26 AM	SiCl4 post valve closed
1/12/2012	10:38:26 AM	Bypass valve closed
1/12/2012	10:38:26 AM	Bubbler valve closed
1/12/2012	10:38:26 AM	Main Vac valve opened
1/12/2012	10:38:26 AM	Helium MFC set to  0.000000
1/12/2012	10:38:26 AM	H2 MFC set to  0.000000
1/12/2012	10:38:26 AM	BCl3 MFC set to  0.000000
1/12/2012	10:38:26 AM	PH3 MFC set to  0.000000
1/12/2012	10:38:26 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:38:26 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:38:26 AM	Tube furnace set to 0
1/12/2012	10:38:56 AM	H2 valve closed
1/12/2012	10:38:56 AM	BCl3 valve closed
1/12/2012	10:38:56 AM	PH3 valve closed
1/12/2012	10:38:56 AM	SiCl4 pre valve closed
1/12/2012	10:38:56 AM	SiCl4 post valve closed
1/12/2012	10:38:56 AM	Bypass valve closed
1/12/2012	10:38:56 AM	Bubbler valve closed
1/12/2012	10:38:56 AM	Helium valve opened
1/12/2012	10:38:56 AM	Main Vac valve opened
1/12/2012	10:38:56 AM	Helium MFC set to  20.000000
1/12/2012	10:38:56 AM	H2 MFC set to  0.000000
1/12/2012	10:38:56 AM	BCl3 MFC set to  0.000000
1/12/2012	10:38:56 AM	PH3 MFC set to  0.000000
1/12/2012	10:38:56 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:38:56 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:38:56 AM	Tube furnace set to 0
1/12/2012	10:39:27 AM	Helium valve closed
1/12/2012	10:39:27 AM	H2 valve closed
1/12/2012	10:39:27 AM	BCl3 valve closed
1/12/2012	10:39:27 AM	PH3 valve closed
1/12/2012	10:39:27 AM	SiCl4 pre valve closed
1/12/2012	10:39:27 AM	SiCl4 post valve closed
1/12/2012	10:39:27 AM	Bypass valve closed
1/12/2012	10:39:27 AM	Bubbler valve closed
1/12/2012	10:39:27 AM	Main Vac valve opened
1/12/2012	10:39:27 AM	Helium MFC set to  0.000000
1/12/2012	10:39:27 AM	H2 MFC set to  0.000000
1/12/2012	10:39:27 AM	BCl3 MFC set to  0.000000
1/12/2012	10:39:27 AM	PH3 MFC set to  0.000000
1/12/2012	10:39:27 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:39:27 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:39:27 AM	Tube furnace set to 0
1/12/2012	10:39:57 AM	H2 valve closed
1/12/2012	10:39:57 AM	BCl3 valve closed
1/12/2012	10:39:57 AM	PH3 valve closed
1/12/2012	10:39:57 AM	SiCl4 pre valve closed
1/12/2012	10:39:57 AM	SiCl4 post valve closed
1/12/2012	10:39:57 AM	Bypass valve closed
1/12/2012	10:39:57 AM	Bubbler valve closed
1/12/2012	10:39:57 AM	Helium valve opened
1/12/2012	10:39:57 AM	Main Vac valve opened
1/12/2012	10:39:57 AM	Helium MFC set to  20.000000
1/12/2012	10:39:57 AM	H2 MFC set to  0.000000
1/12/2012	10:39:57 AM	BCl3 MFC set to  0.000000
1/12/2012	10:39:57 AM	PH3 MFC set to  0.000000
1/12/2012	10:39:57 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:39:57 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:39:57 AM	Tube furnace set to 0
1/12/2012	10:40:27 AM	Helium valve closed
1/12/2012	10:40:27 AM	H2 valve closed
1/12/2012	10:40:27 AM	BCl3 valve closed
1/12/2012	10:40:27 AM	PH3 valve closed
1/12/2012	10:40:27 AM	SiCl4 pre valve closed
1/12/2012	10:40:27 AM	SiCl4 post valve closed
1/12/2012	10:40:27 AM	Bypass valve closed
1/12/2012	10:40:27 AM	Bubbler valve closed
1/12/2012	10:40:27 AM	Main Vac valve opened
1/12/2012	10:40:27 AM	Helium MFC set to  0.000000
1/12/2012	10:40:27 AM	H2 MFC set to  0.000000
1/12/2012	10:40:27 AM	BCl3 MFC set to  0.000000
1/12/2012	10:40:27 AM	PH3 MFC set to  0.000000
1/12/2012	10:40:27 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:40:27 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:40:27 AM	Tube furnace set to 0
1/12/2012	10:40:57 AM	H2 valve closed
1/12/2012	10:40:57 AM	BCl3 valve closed
1/12/2012	10:40:57 AM	PH3 valve closed
1/12/2012	10:40:57 AM	SiCl4 pre valve closed
1/12/2012	10:40:57 AM	SiCl4 post valve closed
1/12/2012	10:40:57 AM	Bypass valve closed
1/12/2012	10:40:57 AM	Bubbler valve closed
1/12/2012	10:40:57 AM	Helium valve opened
1/12/2012	10:40:57 AM	Main Vac valve opened
1/12/2012	10:40:57 AM	Helium MFC set to  20.000000
1/12/2012	10:40:57 AM	H2 MFC set to  0.000000
1/12/2012	10:40:57 AM	BCl3 MFC set to  0.000000
1/12/2012	10:40:57 AM	PH3 MFC set to  0.000000
1/12/2012	10:40:57 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:40:57 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:40:57 AM	Tube furnace set to 0
1/12/2012	10:41:27 AM	Helium valve closed
1/12/2012	10:41:27 AM	H2 valve closed
1/12/2012	10:41:27 AM	BCl3 valve closed
1/12/2012	10:41:27 AM	PH3 valve closed
1/12/2012	10:41:27 AM	SiCl4 pre valve closed
1/12/2012	10:41:27 AM	SiCl4 post valve closed
1/12/2012	10:41:27 AM	Bypass valve closed
1/12/2012	10:41:27 AM	Bubbler valve closed
1/12/2012	10:41:27 AM	Main Vac valve opened
1/12/2012	10:41:27 AM	Helium MFC set to  0.000000
1/12/2012	10:41:27 AM	H2 MFC set to  0.000000
1/12/2012	10:41:27 AM	BCl3 MFC set to  0.000000
1/12/2012	10:41:27 AM	PH3 MFC set to  0.000000
1/12/2012	10:41:27 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:41:27 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:41:27 AM	Tube furnace set to 0
1/12/2012	10:41:58 AM	H2 valve closed
1/12/2012	10:41:58 AM	BCl3 valve closed
1/12/2012	10:41:58 AM	PH3 valve closed
1/12/2012	10:41:58 AM	SiCl4 pre valve closed
1/12/2012	10:41:58 AM	SiCl4 post valve closed
1/12/2012	10:41:58 AM	Bypass valve closed
1/12/2012	10:41:58 AM	Bubbler valve closed
1/12/2012	10:41:58 AM	Helium valve opened
1/12/2012	10:41:58 AM	Main Vac valve opened
1/12/2012	10:41:58 AM	Helium MFC set to  20.000000
1/12/2012	10:41:58 AM	H2 MFC set to  0.000000
1/12/2012	10:41:58 AM	BCl3 MFC set to  0.000000
1/12/2012	10:41:58 AM	PH3 MFC set to  0.000000
1/12/2012	10:41:58 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:41:58 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:41:58 AM	Tube furnace set to 0
1/12/2012	10:42:28 AM	Helium valve closed
1/12/2012	10:42:28 AM	H2 valve closed
1/12/2012	10:42:28 AM	BCl3 valve closed
1/12/2012	10:42:28 AM	PH3 valve closed
1/12/2012	10:42:28 AM	SiCl4 pre valve closed
1/12/2012	10:42:28 AM	SiCl4 post valve closed
1/12/2012	10:42:28 AM	Bypass valve closed
1/12/2012	10:42:28 AM	Bubbler valve closed
1/12/2012	10:42:28 AM	Main Vac valve opened
1/12/2012	10:42:28 AM	Helium MFC set to  0.000000
1/12/2012	10:42:28 AM	H2 MFC set to  0.000000
1/12/2012	10:42:28 AM	BCl3 MFC set to  0.000000
1/12/2012	10:42:28 AM	PH3 MFC set to  0.000000
1/12/2012	10:42:28 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:42:28 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:42:28 AM	Tube furnace set to 0
1/12/2012	10:42:58 AM	H2 valve closed
1/12/2012	10:42:58 AM	BCl3 valve closed
1/12/2012	10:42:58 AM	PH3 valve closed
1/12/2012	10:42:58 AM	SiCl4 pre valve closed
1/12/2012	10:42:58 AM	SiCl4 post valve closed
1/12/2012	10:42:58 AM	Bypass valve closed
1/12/2012	10:42:58 AM	Bubbler valve closed
1/12/2012	10:42:58 AM	Helium valve opened
1/12/2012	10:42:58 AM	Main Vac valve opened
1/12/2012	10:42:58 AM	Helium MFC set to  20.000000
1/12/2012	10:42:58 AM	H2 MFC set to  0.000000
1/12/2012	10:42:58 AM	BCl3 MFC set to  0.000000
1/12/2012	10:42:58 AM	PH3 MFC set to  0.000000
1/12/2012	10:42:58 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:42:58 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:42:58 AM	Tube furnace set to 0
1/12/2012	10:43:28 AM	Helium valve closed
1/12/2012	10:43:28 AM	H2 valve closed
1/12/2012	10:43:28 AM	BCl3 valve closed
1/12/2012	10:43:28 AM	PH3 valve closed
1/12/2012	10:43:28 AM	SiCl4 pre valve closed
1/12/2012	10:43:28 AM	SiCl4 post valve closed
1/12/2012	10:43:28 AM	Bypass valve closed
1/12/2012	10:43:28 AM	Bubbler valve closed
1/12/2012	10:43:28 AM	Main Vac valve opened
1/12/2012	10:43:28 AM	Helium MFC set to  0.000000
1/12/2012	10:43:28 AM	H2 MFC set to  0.000000
1/12/2012	10:43:28 AM	BCl3 MFC set to  0.000000
1/12/2012	10:43:28 AM	PH3 MFC set to  0.000000
1/12/2012	10:43:28 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:43:28 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:43:28 AM	Tube furnace set to 0
1/12/2012	10:43:58 AM	H2 valve closed
1/12/2012	10:43:58 AM	BCl3 valve closed
1/12/2012	10:43:58 AM	PH3 valve closed
1/12/2012	10:43:58 AM	SiCl4 pre valve closed
1/12/2012	10:43:58 AM	SiCl4 post valve closed
1/12/2012	10:43:58 AM	Bypass valve closed
1/12/2012	10:43:58 AM	Bubbler valve closed
1/12/2012	10:43:58 AM	Helium valve opened
1/12/2012	10:43:58 AM	Main Vac valve opened
1/12/2012	10:43:58 AM	Helium MFC set to  20.000000
1/12/2012	10:43:58 AM	H2 MFC set to  0.000000
1/12/2012	10:43:58 AM	BCl3 MFC set to  0.000000
1/12/2012	10:43:58 AM	PH3 MFC set to  0.000000
1/12/2012	10:43:58 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:43:58 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:43:59 AM	Tube furnace set to 0
1/12/2012	10:44:29 AM	Helium valve closed
1/12/2012	10:44:29 AM	H2 valve closed
1/12/2012	10:44:29 AM	BCl3 valve closed
1/12/2012	10:44:29 AM	PH3 valve closed
1/12/2012	10:44:29 AM	SiCl4 pre valve closed
1/12/2012	10:44:29 AM	SiCl4 post valve closed
1/12/2012	10:44:29 AM	Bypass valve closed
1/12/2012	10:44:29 AM	Bubbler valve closed
1/12/2012	10:44:29 AM	Main Vac valve opened
1/12/2012	10:44:29 AM	Helium MFC set to  0.000000
1/12/2012	10:44:29 AM	H2 MFC set to  0.000000
1/12/2012	10:44:29 AM	BCl3 MFC set to  0.000000
1/12/2012	10:44:29 AM	PH3 MFC set to  0.000000
1/12/2012	10:44:29 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:44:29 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:44:29 AM	Tube furnace set to 0
1/12/2012	10:44:59 AM	H2 valve closed
1/12/2012	10:44:59 AM	BCl3 valve closed
1/12/2012	10:44:59 AM	PH3 valve closed
1/12/2012	10:44:59 AM	SiCl4 pre valve closed
1/12/2012	10:44:59 AM	SiCl4 post valve closed
1/12/2012	10:44:59 AM	Bypass valve closed
1/12/2012	10:44:59 AM	Bubbler valve closed
1/12/2012	10:44:59 AM	Helium valve opened
1/12/2012	10:44:59 AM	Main Vac valve opened
1/12/2012	10:44:59 AM	Helium MFC set to  20.000000
1/12/2012	10:44:59 AM	H2 MFC set to  0.000000
1/12/2012	10:44:59 AM	BCl3 MFC set to  0.000000
1/12/2012	10:44:59 AM	PH3 MFC set to  0.000000
1/12/2012	10:44:59 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:44:59 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:44:59 AM	Tube furnace set to 0
1/12/2012	10:45:29 AM	Helium valve closed
1/12/2012	10:45:29 AM	H2 valve closed
1/12/2012	10:45:29 AM	BCl3 valve closed
1/12/2012	10:45:29 AM	PH3 valve closed
1/12/2012	10:45:29 AM	SiCl4 pre valve closed
1/12/2012	10:45:29 AM	SiCl4 post valve closed
1/12/2012	10:45:29 AM	Bypass valve closed
1/12/2012	10:45:29 AM	Bubbler valve closed
1/12/2012	10:45:29 AM	Main Vac valve opened
1/12/2012	10:45:29 AM	Helium MFC set to  0.000000
1/12/2012	10:45:29 AM	H2 MFC set to  0.000000
1/12/2012	10:45:29 AM	BCl3 MFC set to  0.000000
1/12/2012	10:45:29 AM	PH3 MFC set to  0.000000
1/12/2012	10:45:29 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:45:29 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:45:29 AM	Tube furnace set to 0
1/12/2012	10:45:59 AM	H2 valve closed
1/12/2012	10:45:59 AM	BCl3 valve closed
1/12/2012	10:45:59 AM	PH3 valve closed
1/12/2012	10:45:59 AM	SiCl4 pre valve closed
1/12/2012	10:45:59 AM	SiCl4 post valve closed
1/12/2012	10:45:59 AM	Bypass valve closed
1/12/2012	10:45:59 AM	Bubbler valve closed
1/12/2012	10:45:59 AM	Helium valve opened
1/12/2012	10:45:59 AM	Main Vac valve opened
1/12/2012	10:45:59 AM	Helium MFC set to  20.000000
1/12/2012	10:45:59 AM	H2 MFC set to  0.000000
1/12/2012	10:45:59 AM	BCl3 MFC set to  0.000000
1/12/2012	10:45:59 AM	PH3 MFC set to  0.000000
1/12/2012	10:45:59 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:45:59 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:45:59 AM	Tube furnace set to 0
1/12/2012	10:46:29 AM	Helium valve closed
1/12/2012	10:46:29 AM	H2 valve closed
1/12/2012	10:46:29 AM	BCl3 valve closed
1/12/2012	10:46:29 AM	PH3 valve closed
1/12/2012	10:46:29 AM	SiCl4 pre valve closed
1/12/2012	10:46:29 AM	SiCl4 post valve closed
1/12/2012	10:46:29 AM	Bypass valve closed
1/12/2012	10:46:29 AM	Bubbler valve closed
1/12/2012	10:46:29 AM	Main Vac valve opened
1/12/2012	10:46:29 AM	Helium MFC set to  0.000000
1/12/2012	10:46:29 AM	H2 MFC set to  0.000000
1/12/2012	10:46:29 AM	BCl3 MFC set to  0.000000
1/12/2012	10:46:29 AM	PH3 MFC set to  0.000000
1/12/2012	10:46:29 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:46:29 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:46:30 AM	Tube furnace set to 0
1/12/2012	10:47:00 AM	H2 valve closed
1/12/2012	10:47:00 AM	BCl3 valve closed
1/12/2012	10:47:00 AM	PH3 valve closed
1/12/2012	10:47:00 AM	SiCl4 pre valve closed
1/12/2012	10:47:00 AM	SiCl4 post valve closed
1/12/2012	10:47:00 AM	Bypass valve closed
1/12/2012	10:47:00 AM	Bubbler valve closed
1/12/2012	10:47:00 AM	Helium valve opened
1/12/2012	10:47:00 AM	Main Vac valve opened
1/12/2012	10:47:00 AM	Helium MFC set to  20.000000
1/12/2012	10:47:00 AM	H2 MFC set to  0.000000
1/12/2012	10:47:00 AM	BCl3 MFC set to  0.000000
1/12/2012	10:47:00 AM	PH3 MFC set to  0.000000
1/12/2012	10:47:00 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:47:00 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:47:00 AM	Tube furnace set to 0
1/12/2012	10:47:30 AM	Helium valve closed
1/12/2012	10:47:30 AM	H2 valve closed
1/12/2012	10:47:30 AM	BCl3 valve closed
1/12/2012	10:47:30 AM	PH3 valve closed
1/12/2012	10:47:30 AM	SiCl4 pre valve closed
1/12/2012	10:47:30 AM	SiCl4 post valve closed
1/12/2012	10:47:30 AM	Bypass valve closed
1/12/2012	10:47:30 AM	Bubbler valve closed
1/12/2012	10:47:30 AM	Main Vac valve opened
1/12/2012	10:47:30 AM	Helium MFC set to  0.000000
1/12/2012	10:47:30 AM	H2 MFC set to  0.000000
1/12/2012	10:47:30 AM	BCl3 MFC set to  0.000000
1/12/2012	10:47:30 AM	PH3 MFC set to  0.000000
1/12/2012	10:47:30 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:47:30 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:47:30 AM	Tube furnace set to 0
1/12/2012	10:48:00 AM	H2 valve closed
1/12/2012	10:48:00 AM	BCl3 valve closed
1/12/2012	10:48:00 AM	PH3 valve closed
1/12/2012	10:48:00 AM	SiCl4 pre valve closed
1/12/2012	10:48:00 AM	SiCl4 post valve closed
1/12/2012	10:48:00 AM	Bypass valve closed
1/12/2012	10:48:00 AM	Bubbler valve closed
1/12/2012	10:48:00 AM	Helium valve opened
1/12/2012	10:48:00 AM	Main Vac valve opened
1/12/2012	10:48:00 AM	Helium MFC set to  20.000000
1/12/2012	10:48:00 AM	H2 MFC set to  0.000000
1/12/2012	10:48:00 AM	BCl3 MFC set to  0.000000
1/12/2012	10:48:00 AM	PH3 MFC set to  0.000000
1/12/2012	10:48:00 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:48:00 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:48:00 AM	Tube furnace set to 0
1/12/2012	10:48:30 AM	Helium valve closed
1/12/2012	10:48:30 AM	H2 valve closed
1/12/2012	10:48:30 AM	BCl3 valve closed
1/12/2012	10:48:30 AM	PH3 valve closed
1/12/2012	10:48:30 AM	SiCl4 pre valve closed
1/12/2012	10:48:30 AM	SiCl4 post valve closed
1/12/2012	10:48:30 AM	Bypass valve closed
1/12/2012	10:48:30 AM	Bubbler valve closed
1/12/2012	10:48:30 AM	Main Vac valve opened
1/12/2012	10:48:30 AM	Helium MFC set to  0.000000
1/12/2012	10:48:30 AM	H2 MFC set to  0.000000
1/12/2012	10:48:30 AM	BCl3 MFC set to  0.000000
1/12/2012	10:48:30 AM	PH3 MFC set to  0.000000
1/12/2012	10:48:30 AM	SiCl4 MFC set to  0.000000
1/12/2012	10:48:30 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	10:48:30 AM	Tube furnace set to 0
1/12/2012	10:48:31 AM	Run finished at 10:48 AM
1/12/2012	10:48:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/12/2012	11:12:12 AM	Main Vac valve closed
1/12/2012	11:12:22 AM	Main Vac valve opened
1/12/2012	11:26:06 AM	Main Vac valve closed
1/12/2012	11:27:51 AM	Main Vac valve opened
1/12/2012	11:28:28 AM	Recipe started at 11:28 AM
1/12/2012	11:28:28 AM	Helium valve closed
1/12/2012	11:28:28 AM	H2 valve closed
1/12/2012	11:28:28 AM	BCl3 valve closed
1/12/2012	11:28:28 AM	PH3 valve closed
1/12/2012	11:28:28 AM	SiCl4 pre valve closed
1/12/2012	11:28:28 AM	SiCl4 post valve closed
1/12/2012	11:28:28 AM	Main Vac valve closed
1/12/2012	11:28:28 AM	Bypass valve closed
1/12/2012	11:28:28 AM	Bubbler valve closed
1/12/2012	11:28:28 AM	Helium MFC set to  0.000000
1/12/2012	11:28:28 AM	H2 MFC set to  0.000000
1/12/2012	11:28:28 AM	BCl3 MFC set to  0.000000
1/12/2012	11:28:28 AM	PH3 MFC set to  0.000000
1/12/2012	11:28:28 AM	SiCl4 MFC set to  0.000000
1/12/2012	11:28:28 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	11:28:29 AM	Tube furnace set to 0
1/12/2012	11:28:32 AM	Helium valve closed
1/12/2012	11:28:32 AM	BCl3 valve closed
1/12/2012	11:28:32 AM	PH3 valve closed
1/12/2012	11:28:32 AM	SiCl4 pre valve closed
1/12/2012	11:28:32 AM	SiCl4 post valve closed
1/12/2012	11:28:32 AM	Main Vac valve closed
1/12/2012	11:28:32 AM	Bypass valve closed
1/12/2012	11:28:32 AM	Bubbler valve closed
1/12/2012	11:28:32 AM	H2 valve opened
1/12/2012	11:28:32 AM	Helium MFC set to  0.000000
1/12/2012	11:28:32 AM	H2 MFC set to  500.000000
1/12/2012	11:28:32 AM	BCl3 MFC set to  0.000000
1/12/2012	11:28:32 AM	PH3 MFC set to  0.000000
1/12/2012	11:28:32 AM	SiCl4 MFC set to  0.000000
1/12/2012	11:28:32 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	11:28:32 AM	Tube furnace set to 0
1/12/2012	11:29:37 AM	Helium valve closed
1/12/2012	11:29:37 AM	BCl3 valve closed
1/12/2012	11:29:37 AM	PH3 valve closed
1/12/2012	11:29:37 AM	SiCl4 pre valve closed
1/12/2012	11:29:37 AM	SiCl4 post valve closed
1/12/2012	11:29:37 AM	Main Vac valve closed
1/12/2012	11:29:37 AM	Bypass valve closed
1/12/2012	11:29:37 AM	H2 valve opened
1/12/2012	11:29:37 AM	Bubbler valve opened
1/12/2012	11:29:37 AM	Helium MFC set to  0.000000
1/12/2012	11:29:37 AM	H2 MFC set to  500.000000
1/12/2012	11:29:37 AM	BCl3 MFC set to  0.000000
1/12/2012	11:29:37 AM	PH3 MFC set to  0.000000
1/12/2012	11:29:37 AM	SiCl4 MFC set to  0.000000
1/12/2012	11:29:37 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	11:29:37 AM	Tube furnace set to 0
1/12/2012	11:29:38 AM	Helium valve closed
1/12/2012	11:29:38 AM	BCl3 valve closed
1/12/2012	11:29:38 AM	PH3 valve closed
1/12/2012	11:29:38 AM	SiCl4 pre valve closed
1/12/2012	11:29:38 AM	SiCl4 post valve closed
1/12/2012	11:29:38 AM	Main Vac valve closed
1/12/2012	11:29:38 AM	Bypass valve closed
1/12/2012	11:29:38 AM	H2 valve opened
1/12/2012	11:29:38 AM	Bubbler valve opened
1/12/2012	11:29:38 AM	Helium MFC set to  0.000000
1/12/2012	11:29:38 AM	H2 MFC set to  500.000000
1/12/2012	11:29:38 AM	BCl3 MFC set to  0.000000
1/12/2012	11:29:38 AM	PH3 MFC set to  0.000000
1/12/2012	11:29:38 AM	SiCl4 MFC set to  0.000000
1/12/2012	11:29:38 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	11:29:39 AM	Tube furnace set to 1000
1/12/2012	11:51:39 AM	Helium valve closed
1/12/2012	11:51:39 AM	PH3 valve closed
1/12/2012	11:51:39 AM	Main Vac valve closed
1/12/2012	11:51:39 AM	Bypass valve closed
1/12/2012	11:51:39 AM	H2 valve opened
1/12/2012	11:51:39 AM	BCl3 valve opened
1/12/2012	11:51:39 AM	SiCl4 pre valve opened
1/12/2012	11:51:39 AM	SiCl4 post valve opened
1/12/2012	11:51:39 AM	Bubbler valve opened
1/12/2012	11:51:39 AM	Helium MFC set to  0.000000
1/12/2012	11:51:39 AM	H2 MFC set to  500.000000
1/12/2012	11:51:39 AM	BCl3 MFC set to  1.000000
1/12/2012	11:51:39 AM	PH3 MFC set to  0.000000
1/12/2012	11:51:39 AM	SiCl4 MFC set to  25.000000
1/12/2012	11:51:39 AM	Bypass solenoid MFC set to  0.000000
1/12/2012	11:51:39 AM	Tube furnace set to 1000
1/12/2012	12:26:39 PM	Helium valve closed
1/12/2012	12:26:39 PM	BCl3 valve closed
1/12/2012	12:26:39 PM	PH3 valve closed
1/12/2012	12:26:39 PM	SiCl4 pre valve closed
1/12/2012	12:26:39 PM	SiCl4 post valve closed
1/12/2012	12:26:39 PM	Main Vac valve closed
1/12/2012	12:26:39 PM	Bypass valve closed
1/12/2012	12:26:39 PM	H2 valve opened
1/12/2012	12:26:39 PM	Bubbler valve opened
1/12/2012	12:26:39 PM	Helium MFC set to  0.000000
1/12/2012	12:26:39 PM	H2 MFC set to  500.000000
1/12/2012	12:26:39 PM	BCl3 MFC set to  0.000000
1/12/2012	12:26:39 PM	PH3 MFC set to  0.000000
1/12/2012	12:26:39 PM	SiCl4 MFC set to  0.000000
1/12/2012	12:26:39 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	12:26:39 PM	Tube furnace set to 750
1/12/2012	12:31:39 PM	H2 valve closed
1/12/2012	12:31:39 PM	BCl3 valve closed
1/12/2012	12:31:39 PM	PH3 valve closed
1/12/2012	12:31:39 PM	SiCl4 pre valve closed
1/12/2012	12:31:39 PM	SiCl4 post valve closed
1/12/2012	12:31:39 PM	Main Vac valve closed
1/12/2012	12:31:39 PM	Bypass valve closed
1/12/2012	12:31:39 PM	Helium valve opened
1/12/2012	12:31:39 PM	Bubbler valve opened
1/12/2012	12:31:39 PM	Helium MFC set to  500.000000
1/12/2012	12:31:39 PM	H2 MFC set to  0.000000
1/12/2012	12:31:39 PM	BCl3 MFC set to  0.000000
1/12/2012	12:31:39 PM	PH3 MFC set to  0.000000
1/12/2012	12:31:39 PM	SiCl4 MFC set to  0.000000
1/12/2012	12:31:39 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	12:31:39 PM	Tube furnace set to 0
1/12/2012	12:51:39 PM	Helium valve closed
1/12/2012	12:51:39 PM	H2 valve closed
1/12/2012	12:51:39 PM	BCl3 valve closed
1/12/2012	12:51:39 PM	PH3 valve closed
1/12/2012	12:51:39 PM	SiCl4 pre valve closed
1/12/2012	12:51:39 PM	SiCl4 post valve closed
1/12/2012	12:51:39 PM	Main Vac valve closed
1/12/2012	12:51:39 PM	Bypass valve closed
1/12/2012	12:51:39 PM	Bubbler valve closed
1/12/2012	12:51:39 PM	Helium MFC set to  0.000000
1/12/2012	12:51:39 PM	H2 MFC set to  0.000000
1/12/2012	12:51:39 PM	BCl3 MFC set to  0.000000
1/12/2012	12:51:39 PM	PH3 MFC set to  0.000000
1/12/2012	12:51:39 PM	SiCl4 MFC set to  0.000000
1/12/2012	12:51:39 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	12:51:39 PM	Tube furnace set to 0
1/12/2012	12:51:40 PM	Run finished at 12:51 PM
1/12/2012	12:54:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2012	12:54:54 PM	Recipe started at 12:54 PM
1/12/2012	12:54:54 PM	Helium valve closed
1/12/2012	12:54:54 PM	H2 valve closed
1/12/2012	12:54:54 PM	BCl3 valve closed
1/12/2012	12:54:54 PM	PH3 valve closed
1/12/2012	12:54:54 PM	SiCl4 pre valve closed
1/12/2012	12:54:54 PM	SiCl4 post valve closed
1/12/2012	12:54:54 PM	Main Vac valve closed
1/12/2012	12:54:54 PM	Bubbler valve closed
1/12/2012	12:54:54 PM	Bypass valve opened
1/12/2012	12:54:54 PM	Helium MFC set to  0.000000
1/12/2012	12:54:54 PM	H2 MFC set to  0.000000
1/12/2012	12:54:54 PM	BCl3 MFC set to  0.000000
1/12/2012	12:54:54 PM	PH3 MFC set to  0.000000
1/12/2012	12:54:54 PM	SiCl4 MFC set to  0.000000
1/12/2012	12:54:54 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	12:54:54 PM	Tube furnace set to 0
1/12/2012	12:55:50 PM	Helium valve closed
1/12/2012	12:55:50 PM	H2 valve closed
1/12/2012	12:55:50 PM	BCl3 valve closed
1/12/2012	12:55:50 PM	PH3 valve closed
1/12/2012	12:55:50 PM	SiCl4 pre valve closed
1/12/2012	12:55:50 PM	SiCl4 post valve closed
1/12/2012	12:55:50 PM	Main Vac valve closed
1/12/2012	12:55:50 PM	Bubbler valve closed
1/12/2012	12:55:50 PM	Bypass valve opened
1/12/2012	12:55:50 PM	Helium MFC set to  0.000000
1/12/2012	12:55:50 PM	H2 MFC set to  0.000000
1/12/2012	12:55:50 PM	BCl3 MFC set to  0.000000
1/12/2012	12:55:50 PM	PH3 MFC set to  0.000000
1/12/2012	12:55:50 PM	SiCl4 MFC set to  0.000000
1/12/2012	12:55:50 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	12:55:50 PM	Tube furnace set to 0
1/12/2012	12:56:50 PM	Helium valve closed
1/12/2012	12:56:50 PM	H2 valve closed
1/12/2012	12:56:50 PM	BCl3 valve closed
1/12/2012	12:56:50 PM	PH3 valve closed
1/12/2012	12:56:50 PM	SiCl4 pre valve closed
1/12/2012	12:56:50 PM	SiCl4 post valve closed
1/12/2012	12:56:50 PM	Bypass valve closed
1/12/2012	12:56:50 PM	Bubbler valve closed
1/12/2012	12:56:50 PM	Main Vac valve opened
1/12/2012	12:56:50 PM	Helium MFC set to  0.000000
1/12/2012	12:56:50 PM	H2 MFC set to  0.000000
1/12/2012	12:56:50 PM	BCl3 MFC set to  0.000000
1/12/2012	12:56:50 PM	PH3 MFC set to  0.000000
1/12/2012	12:56:50 PM	SiCl4 MFC set to  0.000000
1/12/2012	12:56:50 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	12:56:50 PM	Tube furnace set to 0
1/12/2012	12:56:51 PM	Run finished at 12:56 PM
1/12/2012	12:56:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2012	12:58:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/12/2012	12:58:41 PM	Recipe started at 12:58 PM
1/12/2012	12:58:41 PM	Helium valve closed
1/12/2012	12:58:41 PM	H2 valve closed
1/12/2012	12:58:41 PM	BCl3 valve closed
1/12/2012	12:58:41 PM	PH3 valve closed
1/12/2012	12:58:41 PM	SiCl4 pre valve closed
1/12/2012	12:58:41 PM	SiCl4 post valve closed
1/12/2012	12:58:41 PM	Main Vac valve closed
1/12/2012	12:58:41 PM	Bubbler valve closed
1/12/2012	12:58:41 PM	Bypass valve opened
1/12/2012	12:58:41 PM	Helium MFC set to  0.000000
1/12/2012	12:58:41 PM	H2 MFC set to  0.000000
1/12/2012	12:58:41 PM	BCl3 MFC set to  0.000000
1/12/2012	12:58:41 PM	PH3 MFC set to  0.000000
1/12/2012	12:58:41 PM	SiCl4 MFC set to  0.000000
1/12/2012	12:58:41 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	12:58:41 PM	Tube furnace set to 0
1/12/2012	12:58:41 PM	Helium valve closed
1/12/2012	12:58:41 PM	H2 valve closed
1/12/2012	12:58:41 PM	BCl3 valve closed
1/12/2012	12:58:41 PM	PH3 valve closed
1/12/2012	12:58:41 PM	SiCl4 pre valve closed
1/12/2012	12:58:41 PM	SiCl4 post valve closed
1/12/2012	12:58:41 PM	Main Vac valve closed
1/12/2012	12:58:41 PM	Bubbler valve closed
1/12/2012	12:58:41 PM	Bypass valve opened
1/12/2012	12:58:41 PM	Helium MFC set to  0.000000
1/12/2012	12:58:41 PM	H2 MFC set to  0.000000
1/12/2012	12:58:41 PM	BCl3 MFC set to  0.000000
1/12/2012	12:58:41 PM	PH3 MFC set to  0.000000
1/12/2012	12:58:41 PM	SiCl4 MFC set to  0.000000
1/12/2012	12:58:41 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	12:58:42 PM	Tube furnace set to 0
1/12/2012	12:59:12 PM	Helium valve closed
1/12/2012	12:59:12 PM	H2 valve closed
1/12/2012	12:59:12 PM	BCl3 valve closed
1/12/2012	12:59:12 PM	PH3 valve closed
1/12/2012	12:59:12 PM	SiCl4 pre valve closed
1/12/2012	12:59:12 PM	SiCl4 post valve closed
1/12/2012	12:59:12 PM	Bypass valve closed
1/12/2012	12:59:12 PM	Bubbler valve closed
1/12/2012	12:59:12 PM	Main Vac valve opened
1/12/2012	12:59:12 PM	Helium MFC set to  0.000000
1/12/2012	12:59:12 PM	H2 MFC set to  0.000000
1/12/2012	12:59:12 PM	BCl3 MFC set to  0.000000
1/12/2012	12:59:12 PM	PH3 MFC set to  0.000000
1/12/2012	12:59:12 PM	SiCl4 MFC set to  0.000000
1/12/2012	12:59:12 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	12:59:12 PM	Tube furnace set to 0
1/12/2012	12:59:42 PM	H2 valve closed
1/12/2012	12:59:42 PM	BCl3 valve closed
1/12/2012	12:59:42 PM	PH3 valve closed
1/12/2012	12:59:42 PM	SiCl4 pre valve closed
1/12/2012	12:59:42 PM	SiCl4 post valve closed
1/12/2012	12:59:42 PM	Bypass valve closed
1/12/2012	12:59:42 PM	Bubbler valve closed
1/12/2012	12:59:42 PM	Helium valve opened
1/12/2012	12:59:42 PM	Main Vac valve opened
1/12/2012	12:59:42 PM	Helium MFC set to  20.000000
1/12/2012	12:59:42 PM	H2 MFC set to  0.000000
1/12/2012	12:59:42 PM	BCl3 MFC set to  0.000000
1/12/2012	12:59:42 PM	PH3 MFC set to  0.000000
1/12/2012	12:59:42 PM	SiCl4 MFC set to  0.000000
1/12/2012	12:59:42 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	12:59:42 PM	Tube furnace set to 0
1/12/2012	1:00:12 PM	Helium valve closed
1/12/2012	1:00:12 PM	H2 valve closed
1/12/2012	1:00:12 PM	BCl3 valve closed
1/12/2012	1:00:12 PM	PH3 valve closed
1/12/2012	1:00:12 PM	SiCl4 pre valve closed
1/12/2012	1:00:12 PM	SiCl4 post valve closed
1/12/2012	1:00:12 PM	Bypass valve closed
1/12/2012	1:00:12 PM	Bubbler valve closed
1/12/2012	1:00:12 PM	Main Vac valve opened
1/12/2012	1:00:12 PM	Helium MFC set to  0.000000
1/12/2012	1:00:12 PM	H2 MFC set to  0.000000
1/12/2012	1:00:12 PM	BCl3 MFC set to  0.000000
1/12/2012	1:00:12 PM	PH3 MFC set to  0.000000
1/12/2012	1:00:12 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:00:12 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:00:12 PM	Tube furnace set to 0
1/12/2012	1:00:42 PM	H2 valve closed
1/12/2012	1:00:42 PM	BCl3 valve closed
1/12/2012	1:00:42 PM	PH3 valve closed
1/12/2012	1:00:42 PM	SiCl4 pre valve closed
1/12/2012	1:00:42 PM	SiCl4 post valve closed
1/12/2012	1:00:42 PM	Bypass valve closed
1/12/2012	1:00:42 PM	Bubbler valve closed
1/12/2012	1:00:42 PM	Helium valve opened
1/12/2012	1:00:42 PM	Main Vac valve opened
1/12/2012	1:00:42 PM	Helium MFC set to  20.000000
1/12/2012	1:00:42 PM	H2 MFC set to  0.000000
1/12/2012	1:00:42 PM	BCl3 MFC set to  0.000000
1/12/2012	1:00:42 PM	PH3 MFC set to  0.000000
1/12/2012	1:00:42 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:00:42 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:00:42 PM	Tube furnace set to 0
1/12/2012	1:01:12 PM	Helium valve closed
1/12/2012	1:01:12 PM	H2 valve closed
1/12/2012	1:01:12 PM	BCl3 valve closed
1/12/2012	1:01:12 PM	PH3 valve closed
1/12/2012	1:01:12 PM	SiCl4 pre valve closed
1/12/2012	1:01:12 PM	SiCl4 post valve closed
1/12/2012	1:01:12 PM	Bypass valve closed
1/12/2012	1:01:12 PM	Bubbler valve closed
1/12/2012	1:01:12 PM	Main Vac valve opened
1/12/2012	1:01:12 PM	Helium MFC set to  0.000000
1/12/2012	1:01:12 PM	H2 MFC set to  0.000000
1/12/2012	1:01:12 PM	BCl3 MFC set to  0.000000
1/12/2012	1:01:12 PM	PH3 MFC set to  0.000000
1/12/2012	1:01:12 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:01:12 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:01:13 PM	Tube furnace set to 0
1/12/2012	1:01:43 PM	H2 valve closed
1/12/2012	1:01:43 PM	BCl3 valve closed
1/12/2012	1:01:43 PM	PH3 valve closed
1/12/2012	1:01:43 PM	SiCl4 pre valve closed
1/12/2012	1:01:43 PM	SiCl4 post valve closed
1/12/2012	1:01:43 PM	Bypass valve closed
1/12/2012	1:01:43 PM	Bubbler valve closed
1/12/2012	1:01:43 PM	Helium valve opened
1/12/2012	1:01:43 PM	Main Vac valve opened
1/12/2012	1:01:43 PM	Helium MFC set to  20.000000
1/12/2012	1:01:43 PM	H2 MFC set to  0.000000
1/12/2012	1:01:43 PM	BCl3 MFC set to  0.000000
1/12/2012	1:01:43 PM	PH3 MFC set to  0.000000
1/12/2012	1:01:43 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:01:43 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:01:43 PM	Tube furnace set to 0
1/12/2012	1:02:13 PM	Helium valve closed
1/12/2012	1:02:13 PM	H2 valve closed
1/12/2012	1:02:13 PM	BCl3 valve closed
1/12/2012	1:02:13 PM	PH3 valve closed
1/12/2012	1:02:13 PM	SiCl4 pre valve closed
1/12/2012	1:02:13 PM	SiCl4 post valve closed
1/12/2012	1:02:13 PM	Bypass valve closed
1/12/2012	1:02:13 PM	Bubbler valve closed
1/12/2012	1:02:13 PM	Main Vac valve opened
1/12/2012	1:02:13 PM	Helium MFC set to  0.000000
1/12/2012	1:02:13 PM	H2 MFC set to  0.000000
1/12/2012	1:02:13 PM	BCl3 MFC set to  0.000000
1/12/2012	1:02:13 PM	PH3 MFC set to  0.000000
1/12/2012	1:02:13 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:02:13 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:02:13 PM	Tube furnace set to 0
1/12/2012	1:02:43 PM	H2 valve closed
1/12/2012	1:02:43 PM	BCl3 valve closed
1/12/2012	1:02:43 PM	PH3 valve closed
1/12/2012	1:02:43 PM	SiCl4 pre valve closed
1/12/2012	1:02:43 PM	SiCl4 post valve closed
1/12/2012	1:02:43 PM	Bypass valve closed
1/12/2012	1:02:43 PM	Bubbler valve closed
1/12/2012	1:02:43 PM	Helium valve opened
1/12/2012	1:02:43 PM	Main Vac valve opened
1/12/2012	1:02:43 PM	Helium MFC set to  20.000000
1/12/2012	1:02:43 PM	H2 MFC set to  0.000000
1/12/2012	1:02:43 PM	BCl3 MFC set to  0.000000
1/12/2012	1:02:43 PM	PH3 MFC set to  0.000000
1/12/2012	1:02:43 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:02:43 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:02:43 PM	Tube furnace set to 0
1/12/2012	1:03:13 PM	Helium valve closed
1/12/2012	1:03:13 PM	H2 valve closed
1/12/2012	1:03:13 PM	BCl3 valve closed
1/12/2012	1:03:13 PM	PH3 valve closed
1/12/2012	1:03:13 PM	SiCl4 pre valve closed
1/12/2012	1:03:13 PM	SiCl4 post valve closed
1/12/2012	1:03:13 PM	Bypass valve closed
1/12/2012	1:03:13 PM	Bubbler valve closed
1/12/2012	1:03:13 PM	Main Vac valve opened
1/12/2012	1:03:13 PM	Helium MFC set to  0.000000
1/12/2012	1:03:13 PM	H2 MFC set to  0.000000
1/12/2012	1:03:13 PM	BCl3 MFC set to  0.000000
1/12/2012	1:03:13 PM	PH3 MFC set to  0.000000
1/12/2012	1:03:13 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:03:13 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:03:13 PM	Tube furnace set to 0
1/12/2012	1:03:43 PM	H2 valve closed
1/12/2012	1:03:43 PM	BCl3 valve closed
1/12/2012	1:03:43 PM	PH3 valve closed
1/12/2012	1:03:43 PM	SiCl4 pre valve closed
1/12/2012	1:03:43 PM	SiCl4 post valve closed
1/12/2012	1:03:43 PM	Bypass valve closed
1/12/2012	1:03:43 PM	Bubbler valve closed
1/12/2012	1:03:43 PM	Helium valve opened
1/12/2012	1:03:43 PM	Main Vac valve opened
1/12/2012	1:03:43 PM	Helium MFC set to  20.000000
1/12/2012	1:03:43 PM	H2 MFC set to  0.000000
1/12/2012	1:03:43 PM	BCl3 MFC set to  0.000000
1/12/2012	1:03:43 PM	PH3 MFC set to  0.000000
1/12/2012	1:03:43 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:03:43 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:03:44 PM	Tube furnace set to 0
1/12/2012	1:04:14 PM	Helium valve closed
1/12/2012	1:04:14 PM	H2 valve closed
1/12/2012	1:04:14 PM	BCl3 valve closed
1/12/2012	1:04:14 PM	PH3 valve closed
1/12/2012	1:04:14 PM	SiCl4 pre valve closed
1/12/2012	1:04:14 PM	SiCl4 post valve closed
1/12/2012	1:04:14 PM	Bypass valve closed
1/12/2012	1:04:14 PM	Bubbler valve closed
1/12/2012	1:04:14 PM	Main Vac valve opened
1/12/2012	1:04:14 PM	Helium MFC set to  0.000000
1/12/2012	1:04:14 PM	H2 MFC set to  0.000000
1/12/2012	1:04:14 PM	BCl3 MFC set to  0.000000
1/12/2012	1:04:14 PM	PH3 MFC set to  0.000000
1/12/2012	1:04:14 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:04:14 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:04:14 PM	Tube furnace set to 0
1/12/2012	1:04:44 PM	H2 valve closed
1/12/2012	1:04:44 PM	BCl3 valve closed
1/12/2012	1:04:44 PM	PH3 valve closed
1/12/2012	1:04:44 PM	SiCl4 pre valve closed
1/12/2012	1:04:44 PM	SiCl4 post valve closed
1/12/2012	1:04:44 PM	Bypass valve closed
1/12/2012	1:04:44 PM	Bubbler valve closed
1/12/2012	1:04:44 PM	Helium valve opened
1/12/2012	1:04:44 PM	Main Vac valve opened
1/12/2012	1:04:44 PM	Helium MFC set to  20.000000
1/12/2012	1:04:44 PM	H2 MFC set to  0.000000
1/12/2012	1:04:44 PM	BCl3 MFC set to  0.000000
1/12/2012	1:04:44 PM	PH3 MFC set to  0.000000
1/12/2012	1:04:44 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:04:44 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:04:44 PM	Tube furnace set to 0
1/12/2012	1:05:14 PM	Helium valve closed
1/12/2012	1:05:14 PM	H2 valve closed
1/12/2012	1:05:14 PM	BCl3 valve closed
1/12/2012	1:05:14 PM	PH3 valve closed
1/12/2012	1:05:14 PM	SiCl4 pre valve closed
1/12/2012	1:05:14 PM	SiCl4 post valve closed
1/12/2012	1:05:14 PM	Bypass valve closed
1/12/2012	1:05:14 PM	Bubbler valve closed
1/12/2012	1:05:14 PM	Main Vac valve opened
1/12/2012	1:05:14 PM	Helium MFC set to  0.000000
1/12/2012	1:05:14 PM	H2 MFC set to  0.000000
1/12/2012	1:05:14 PM	BCl3 MFC set to  0.000000
1/12/2012	1:05:14 PM	PH3 MFC set to  0.000000
1/12/2012	1:05:14 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:05:14 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:05:14 PM	Tube furnace set to 0
1/12/2012	1:05:44 PM	H2 valve closed
1/12/2012	1:05:44 PM	BCl3 valve closed
1/12/2012	1:05:44 PM	PH3 valve closed
1/12/2012	1:05:44 PM	SiCl4 pre valve closed
1/12/2012	1:05:44 PM	SiCl4 post valve closed
1/12/2012	1:05:44 PM	Bypass valve closed
1/12/2012	1:05:44 PM	Bubbler valve closed
1/12/2012	1:05:44 PM	Helium valve opened
1/12/2012	1:05:44 PM	Main Vac valve opened
1/12/2012	1:05:44 PM	Helium MFC set to  20.000000
1/12/2012	1:05:44 PM	H2 MFC set to  0.000000
1/12/2012	1:05:44 PM	BCl3 MFC set to  0.000000
1/12/2012	1:05:44 PM	PH3 MFC set to  0.000000
1/12/2012	1:05:44 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:05:44 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:05:44 PM	Tube furnace set to 0
1/12/2012	1:06:14 PM	Helium valve closed
1/12/2012	1:06:14 PM	H2 valve closed
1/12/2012	1:06:14 PM	BCl3 valve closed
1/12/2012	1:06:14 PM	PH3 valve closed
1/12/2012	1:06:14 PM	SiCl4 pre valve closed
1/12/2012	1:06:14 PM	SiCl4 post valve closed
1/12/2012	1:06:14 PM	Bypass valve closed
1/12/2012	1:06:14 PM	Bubbler valve closed
1/12/2012	1:06:14 PM	Main Vac valve opened
1/12/2012	1:06:14 PM	Helium MFC set to  0.000000
1/12/2012	1:06:15 PM	H2 MFC set to  0.000000
1/12/2012	1:06:15 PM	BCl3 MFC set to  0.000000
1/12/2012	1:06:15 PM	PH3 MFC set to  0.000000
1/12/2012	1:06:15 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:06:15 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:06:15 PM	Tube furnace set to 0
1/12/2012	1:06:45 PM	H2 valve closed
1/12/2012	1:06:45 PM	BCl3 valve closed
1/12/2012	1:06:45 PM	PH3 valve closed
1/12/2012	1:06:45 PM	SiCl4 pre valve closed
1/12/2012	1:06:45 PM	SiCl4 post valve closed
1/12/2012	1:06:45 PM	Bypass valve closed
1/12/2012	1:06:45 PM	Bubbler valve closed
1/12/2012	1:06:45 PM	Helium valve opened
1/12/2012	1:06:45 PM	Main Vac valve opened
1/12/2012	1:06:45 PM	Helium MFC set to  20.000000
1/12/2012	1:06:45 PM	H2 MFC set to  0.000000
1/12/2012	1:06:45 PM	BCl3 MFC set to  0.000000
1/12/2012	1:06:45 PM	PH3 MFC set to  0.000000
1/12/2012	1:06:45 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:06:45 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:06:45 PM	Tube furnace set to 0
1/12/2012	1:07:15 PM	Helium valve closed
1/12/2012	1:07:15 PM	H2 valve closed
1/12/2012	1:07:15 PM	BCl3 valve closed
1/12/2012	1:07:15 PM	PH3 valve closed
1/12/2012	1:07:15 PM	SiCl4 pre valve closed
1/12/2012	1:07:15 PM	SiCl4 post valve closed
1/12/2012	1:07:15 PM	Bypass valve closed
1/12/2012	1:07:15 PM	Bubbler valve closed
1/12/2012	1:07:15 PM	Main Vac valve opened
1/12/2012	1:07:15 PM	Helium MFC set to  0.000000
1/12/2012	1:07:15 PM	H2 MFC set to  0.000000
1/12/2012	1:07:15 PM	BCl3 MFC set to  0.000000
1/12/2012	1:07:15 PM	PH3 MFC set to  0.000000
1/12/2012	1:07:15 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:07:15 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:07:15 PM	Tube furnace set to 0
1/12/2012	1:07:45 PM	H2 valve closed
1/12/2012	1:07:45 PM	BCl3 valve closed
1/12/2012	1:07:45 PM	PH3 valve closed
1/12/2012	1:07:45 PM	SiCl4 pre valve closed
1/12/2012	1:07:45 PM	SiCl4 post valve closed
1/12/2012	1:07:45 PM	Bypass valve closed
1/12/2012	1:07:45 PM	Bubbler valve closed
1/12/2012	1:07:45 PM	Helium valve opened
1/12/2012	1:07:45 PM	Main Vac valve opened
1/12/2012	1:07:45 PM	Helium MFC set to  20.000000
1/12/2012	1:07:45 PM	H2 MFC set to  0.000000
1/12/2012	1:07:45 PM	BCl3 MFC set to  0.000000
1/12/2012	1:07:45 PM	PH3 MFC set to  0.000000
1/12/2012	1:07:45 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:07:45 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:07:45 PM	Tube furnace set to 0
1/12/2012	1:08:15 PM	Helium valve closed
1/12/2012	1:08:15 PM	H2 valve closed
1/12/2012	1:08:15 PM	BCl3 valve closed
1/12/2012	1:08:15 PM	PH3 valve closed
1/12/2012	1:08:15 PM	SiCl4 pre valve closed
1/12/2012	1:08:15 PM	SiCl4 post valve closed
1/12/2012	1:08:15 PM	Bypass valve closed
1/12/2012	1:08:15 PM	Bubbler valve closed
1/12/2012	1:08:15 PM	Main Vac valve opened
1/12/2012	1:08:15 PM	Helium MFC set to  0.000000
1/12/2012	1:08:15 PM	H2 MFC set to  0.000000
1/12/2012	1:08:15 PM	BCl3 MFC set to  0.000000
1/12/2012	1:08:15 PM	PH3 MFC set to  0.000000
1/12/2012	1:08:15 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:08:15 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:08:16 PM	Tube furnace set to 0
1/12/2012	1:08:46 PM	H2 valve closed
1/12/2012	1:08:46 PM	BCl3 valve closed
1/12/2012	1:08:46 PM	PH3 valve closed
1/12/2012	1:08:46 PM	SiCl4 pre valve closed
1/12/2012	1:08:46 PM	SiCl4 post valve closed
1/12/2012	1:08:46 PM	Bypass valve closed
1/12/2012	1:08:46 PM	Bubbler valve closed
1/12/2012	1:08:46 PM	Helium valve opened
1/12/2012	1:08:46 PM	Main Vac valve opened
1/12/2012	1:08:46 PM	Helium MFC set to  20.000000
1/12/2012	1:08:46 PM	H2 MFC set to  0.000000
1/12/2012	1:08:46 PM	BCl3 MFC set to  0.000000
1/12/2012	1:08:46 PM	PH3 MFC set to  0.000000
1/12/2012	1:08:46 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:08:46 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:08:46 PM	Tube furnace set to 0
1/12/2012	1:09:16 PM	Helium valve closed
1/12/2012	1:09:16 PM	H2 valve closed
1/12/2012	1:09:16 PM	BCl3 valve closed
1/12/2012	1:09:16 PM	PH3 valve closed
1/12/2012	1:09:16 PM	SiCl4 pre valve closed
1/12/2012	1:09:16 PM	SiCl4 post valve closed
1/12/2012	1:09:16 PM	Bypass valve closed
1/12/2012	1:09:16 PM	Bubbler valve closed
1/12/2012	1:09:16 PM	Main Vac valve opened
1/12/2012	1:09:16 PM	Helium MFC set to  0.000000
1/12/2012	1:09:16 PM	H2 MFC set to  0.000000
1/12/2012	1:09:16 PM	BCl3 MFC set to  0.000000
1/12/2012	1:09:16 PM	PH3 MFC set to  0.000000
1/12/2012	1:09:16 PM	SiCl4 MFC set to  0.000000
1/12/2012	1:09:16 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	1:09:16 PM	Tube furnace set to 0
1/12/2012	1:09:17 PM	Run finished at 1:09 PM
1/12/2012	1:09:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/12/2012	2:05:59 PM	Main Vac valve closed
1/12/2012	2:06:12 PM	Main Vac valve opened
1/12/2012	2:07:00 PM	Recipe started at 2:06 PM
1/12/2012	2:07:00 PM	Helium valve closed
1/12/2012	2:07:00 PM	H2 valve closed
1/12/2012	2:07:00 PM	BCl3 valve closed
1/12/2012	2:07:00 PM	PH3 valve closed
1/12/2012	2:07:00 PM	SiCl4 pre valve closed
1/12/2012	2:07:00 PM	SiCl4 post valve closed
1/12/2012	2:07:00 PM	Main Vac valve closed
1/12/2012	2:07:00 PM	Bypass valve closed
1/12/2012	2:07:00 PM	Bubbler valve closed
1/12/2012	2:07:00 PM	Helium MFC set to  0.000000
1/12/2012	2:07:00 PM	H2 MFC set to  0.000000
1/12/2012	2:07:00 PM	BCl3 MFC set to  0.000000
1/12/2012	2:07:00 PM	PH3 MFC set to  0.000000
1/12/2012	2:07:00 PM	SiCl4 MFC set to  0.000000
1/12/2012	2:07:00 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	2:07:00 PM	Tube furnace set to 0
1/12/2012	2:07:03 PM	Helium valve closed
1/12/2012	2:07:03 PM	BCl3 valve closed
1/12/2012	2:07:03 PM	PH3 valve closed
1/12/2012	2:07:03 PM	SiCl4 pre valve closed
1/12/2012	2:07:03 PM	SiCl4 post valve closed
1/12/2012	2:07:03 PM	Main Vac valve closed
1/12/2012	2:07:03 PM	Bypass valve closed
1/12/2012	2:07:03 PM	Bubbler valve closed
1/12/2012	2:07:03 PM	H2 valve opened
1/12/2012	2:07:03 PM	Helium MFC set to  0.000000
1/12/2012	2:07:03 PM	H2 MFC set to  500.000000
1/12/2012	2:07:03 PM	BCl3 MFC set to  0.000000
1/12/2012	2:07:03 PM	PH3 MFC set to  0.000000
1/12/2012	2:07:03 PM	SiCl4 MFC set to  0.000000
1/12/2012	2:07:03 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	2:07:03 PM	Tube furnace set to 0
1/12/2012	2:08:12 PM	Helium valve closed
1/12/2012	2:08:12 PM	BCl3 valve closed
1/12/2012	2:08:12 PM	PH3 valve closed
1/12/2012	2:08:12 PM	SiCl4 pre valve closed
1/12/2012	2:08:12 PM	SiCl4 post valve closed
1/12/2012	2:08:12 PM	Main Vac valve closed
1/12/2012	2:08:12 PM	Bypass valve closed
1/12/2012	2:08:12 PM	H2 valve opened
1/12/2012	2:08:12 PM	Bubbler valve opened
1/12/2012	2:08:12 PM	Helium MFC set to  0.000000
1/12/2012	2:08:12 PM	H2 MFC set to  500.000000
1/12/2012	2:08:12 PM	BCl3 MFC set to  0.000000
1/12/2012	2:08:12 PM	PH3 MFC set to  0.000000
1/12/2012	2:08:12 PM	SiCl4 MFC set to  0.000000
1/12/2012	2:08:12 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	2:08:13 PM	Tube furnace set to 0
1/12/2012	2:08:14 PM	Helium valve closed
1/12/2012	2:08:14 PM	BCl3 valve closed
1/12/2012	2:08:14 PM	PH3 valve closed
1/12/2012	2:08:14 PM	SiCl4 pre valve closed
1/12/2012	2:08:14 PM	SiCl4 post valve closed
1/12/2012	2:08:14 PM	Main Vac valve closed
1/12/2012	2:08:14 PM	Bypass valve closed
1/12/2012	2:08:14 PM	H2 valve opened
1/12/2012	2:08:14 PM	Bubbler valve opened
1/12/2012	2:08:14 PM	Helium MFC set to  0.000000
1/12/2012	2:08:14 PM	H2 MFC set to  500.000000
1/12/2012	2:08:14 PM	BCl3 MFC set to  0.000000
1/12/2012	2:08:14 PM	PH3 MFC set to  0.000000
1/12/2012	2:08:14 PM	SiCl4 MFC set to  0.000000
1/12/2012	2:08:14 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	2:08:14 PM	Tube furnace set to 1000
1/12/2012	2:30:14 PM	Helium valve closed
1/12/2012	2:30:14 PM	PH3 valve closed
1/12/2012	2:30:14 PM	Main Vac valve closed
1/12/2012	2:30:14 PM	Bypass valve closed
1/12/2012	2:30:14 PM	H2 valve opened
1/12/2012	2:30:14 PM	BCl3 valve opened
1/12/2012	2:30:14 PM	SiCl4 pre valve opened
1/12/2012	2:30:14 PM	SiCl4 post valve opened
1/12/2012	2:30:14 PM	Bubbler valve opened
1/12/2012	2:30:14 PM	Helium MFC set to  0.000000
1/12/2012	2:30:14 PM	H2 MFC set to  500.000000
1/12/2012	2:30:14 PM	BCl3 MFC set to  3.000000
1/12/2012	2:30:14 PM	PH3 MFC set to  0.000000
1/12/2012	2:30:14 PM	SiCl4 MFC set to  25.000000
1/12/2012	2:30:14 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	2:30:14 PM	Tube furnace set to 1000
1/12/2012	3:05:14 PM	Helium valve closed
1/12/2012	3:05:14 PM	BCl3 valve closed
1/12/2012	3:05:14 PM	PH3 valve closed
1/12/2012	3:05:14 PM	SiCl4 pre valve closed
1/12/2012	3:05:14 PM	SiCl4 post valve closed
1/12/2012	3:05:14 PM	Main Vac valve closed
1/12/2012	3:05:14 PM	Bypass valve closed
1/12/2012	3:05:14 PM	H2 valve opened
1/12/2012	3:05:14 PM	Bubbler valve opened
1/12/2012	3:05:14 PM	Helium MFC set to  0.000000
1/12/2012	3:05:14 PM	H2 MFC set to  500.000000
1/12/2012	3:05:14 PM	BCl3 MFC set to  0.000000
1/12/2012	3:05:14 PM	PH3 MFC set to  0.000000
1/12/2012	3:05:14 PM	SiCl4 MFC set to  0.000000
1/12/2012	3:05:14 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	3:05:14 PM	Tube furnace set to 750
1/12/2012	3:10:14 PM	H2 valve closed
1/12/2012	3:10:14 PM	BCl3 valve closed
1/12/2012	3:10:14 PM	PH3 valve closed
1/12/2012	3:10:14 PM	SiCl4 pre valve closed
1/12/2012	3:10:14 PM	SiCl4 post valve closed
1/12/2012	3:10:14 PM	Main Vac valve closed
1/12/2012	3:10:14 PM	Bypass valve closed
1/12/2012	3:10:14 PM	Helium valve opened
1/12/2012	3:10:14 PM	Bubbler valve opened
1/12/2012	3:10:14 PM	Helium MFC set to  500.000000
1/12/2012	3:10:14 PM	H2 MFC set to  0.000000
1/12/2012	3:10:14 PM	BCl3 MFC set to  0.000000
1/12/2012	3:10:14 PM	PH3 MFC set to  0.000000
1/12/2012	3:10:14 PM	SiCl4 MFC set to  0.000000
1/12/2012	3:10:14 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	3:10:14 PM	Tube furnace set to 0
1/12/2012	3:30:14 PM	Helium valve closed
1/12/2012	3:30:14 PM	H2 valve closed
1/12/2012	3:30:14 PM	BCl3 valve closed
1/12/2012	3:30:14 PM	PH3 valve closed
1/12/2012	3:30:14 PM	SiCl4 pre valve closed
1/12/2012	3:30:14 PM	SiCl4 post valve closed
1/12/2012	3:30:14 PM	Main Vac valve closed
1/12/2012	3:30:14 PM	Bypass valve closed
1/12/2012	3:30:14 PM	Bubbler valve closed
1/12/2012	3:30:14 PM	Helium MFC set to  0.000000
1/12/2012	3:30:14 PM	H2 MFC set to  0.000000
1/12/2012	3:30:14 PM	BCl3 MFC set to  0.000000
1/12/2012	3:30:14 PM	PH3 MFC set to  0.000000
1/12/2012	3:30:14 PM	SiCl4 MFC set to  0.000000
1/12/2012	3:30:14 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	3:30:15 PM	Tube furnace set to 0
1/12/2012	3:30:16 PM	Run finished at 3:30 PM
1/12/2012	4:00:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2012	4:00:04 PM	Recipe started at 4:00 PM
1/12/2012	4:00:04 PM	Helium valve closed
1/12/2012	4:00:04 PM	H2 valve closed
1/12/2012	4:00:04 PM	BCl3 valve closed
1/12/2012	4:00:04 PM	PH3 valve closed
1/12/2012	4:00:04 PM	SiCl4 pre valve closed
1/12/2012	4:00:04 PM	SiCl4 post valve closed
1/12/2012	4:00:04 PM	Main Vac valve closed
1/12/2012	4:00:04 PM	Bubbler valve closed
1/12/2012	4:00:04 PM	Bypass valve opened
1/12/2012	4:00:04 PM	Helium MFC set to  0.000000
1/12/2012	4:00:04 PM	H2 MFC set to  0.000000
1/12/2012	4:00:04 PM	BCl3 MFC set to  0.000000
1/12/2012	4:00:04 PM	PH3 MFC set to  0.000000
1/12/2012	4:00:04 PM	SiCl4 MFC set to  0.000000
1/12/2012	4:00:04 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	4:00:04 PM	Tube furnace set to 0
1/12/2012	4:00:59 PM	Helium valve closed
1/12/2012	4:00:59 PM	H2 valve closed
1/12/2012	4:00:59 PM	BCl3 valve closed
1/12/2012	4:00:59 PM	PH3 valve closed
1/12/2012	4:00:59 PM	SiCl4 pre valve closed
1/12/2012	4:00:59 PM	SiCl4 post valve closed
1/12/2012	4:00:59 PM	Main Vac valve closed
1/12/2012	4:00:59 PM	Bubbler valve closed
1/12/2012	4:00:59 PM	Bypass valve opened
1/12/2012	4:00:59 PM	Helium MFC set to  0.000000
1/12/2012	4:00:59 PM	H2 MFC set to  0.000000
1/12/2012	4:00:59 PM	BCl3 MFC set to  0.000000
1/12/2012	4:00:59 PM	PH3 MFC set to  0.000000
1/12/2012	4:00:59 PM	SiCl4 MFC set to  0.000000
1/12/2012	4:00:59 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	4:00:59 PM	Tube furnace set to 0
1/12/2012	4:01:59 PM	Helium valve closed
1/12/2012	4:01:59 PM	H2 valve closed
1/12/2012	4:01:59 PM	BCl3 valve closed
1/12/2012	4:01:59 PM	PH3 valve closed
1/12/2012	4:01:59 PM	SiCl4 pre valve closed
1/12/2012	4:01:59 PM	SiCl4 post valve closed
1/12/2012	4:01:59 PM	Bypass valve closed
1/12/2012	4:01:59 PM	Bubbler valve closed
1/12/2012	4:01:59 PM	Main Vac valve opened
1/12/2012	4:01:59 PM	Helium MFC set to  0.000000
1/12/2012	4:01:59 PM	H2 MFC set to  0.000000
1/12/2012	4:01:59 PM	BCl3 MFC set to  0.000000
1/12/2012	4:01:59 PM	PH3 MFC set to  0.000000
1/12/2012	4:01:59 PM	SiCl4 MFC set to  0.000000
1/12/2012	4:01:59 PM	Bypass solenoid MFC set to  0.000000
1/12/2012	4:01:59 PM	Tube furnace set to 0
1/12/2012	4:02:00 PM	Run finished at 4:02 PM
1/12/2012	4:02:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
